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Semiconductor, With the aim of "compete with good quality and develop with creativity" and the service principle of "take customers' demand as orientation", we are going to earnestly supply qualified solutions and good service for domestic and international customers.

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  • Tantalum Carbide Coated Chuck

    Tantalum Carbide Coated Chuck

    VeTek Semiconductor is a leading Tantalum Carbide Coated Chuck manufacturer and innovator in China.We have been specialized in TaC coating for many years.Our products have a high purity and high temperature resistance up to 2000℃.We look forward to becoming your long-term partner in China.Welcome to consult at any time.
  • Pyrolytic Carbon(PyC) Coated Graphite Ring

    Pyrolytic Carbon(PyC) Coated Graphite Ring

    In SiC PVT crystal growth setups, graphite parts are run at very high temperatures for long periods. VeTek’s PyC coated graphite ring is built for that kind of duty. A pyrolytic carbon layer gets deposited onto high-purity graphite via CVD. This gives the part better surface stability and fewer particles coming off during operation. You usually put it in the thermal field area to help manage vapor flow and how heat spreads inside the furnace. The coating also slows down graphite sublimation when things go above 2200°C, which makes the whole component last longer.
  • GaN on SiC epi susceptor

    GaN on SiC epi susceptor

    GaN on SiC epi susceptor plays a vital role in semiconductor processing through its excellent thermal conductivity, high temperature processing ability and chemical stability, and ensures the high efficiency and material quality of the GaN epitaxial growth process. VeTek Semiconductor is a China professional manufacturer of GaN on SiC epi susceptor ,We sincerely look forward to your further consultation.
  • LPE SiC EPI Halfmoon

    LPE SiC EPI Halfmoon

    LPE SiC Epi Halfmoon is a special design for horizonational epitaxy furnace, a revolutionary product designed to elevate LPE reactor SiC epitaxy processes. This cutting-edge solution boasts several key features that ensure superior performance and efficiency throughout your manufacturing operations.Vetek Semiconductor is professional at manufacturing LPE SiC Epi halfmoon in 6 inch,8inch.Looking forward to setting up long term cooperation with you.
  • Halfmoon for LPE Reaction Chamber

    Halfmoon for LPE Reaction Chamber

    The Halfmoon is a graphite component used inside LPE SiC reactors, mainly installed around the chamber hot zone. Although it does not directly contact the wafer, it still plays a role in gas flow stability and reactor operation during epitaxial growth.To handle high temperature and reactive process conditions, the component is usually protected with CVD SiC coating, while TaC coating is also available for some applications. VETEK also supplies graphite felt insulation and other coated graphite parts for SiC epitaxy systems.
  • SiC Coating Collector Bottom

    SiC Coating Collector Bottom

    With our expertise in CVD SiC coating manufacturing, VeTek Semiconductor proudly presents Aixtron SiC Coating Collector Bottom,center and top. These SiC Coating Collector Bottom is constructed using high purity graphite and are coated with CVD SiC, ensuring impurity below 5ppm. Feel free to reach out to us for further information and inquiries.

  • What’s the specific application of TaC coated parts in the semiconductor field?

    Tantalum carbide (TaC) coatings are widely used in the semiconductor field, mainly for epitaxial growth reactor components, single crystal growth key components, high-temperature industrial components, MOCVD system heaters and wafer carriers.Its excellent high temperature resistance and corrosion resistance can improve equipment durability, yield and crystal quality, reduce energy consumption and improve stability.

  • What Materials Are Used in Semiconductor Ceramic Components?

    Alumina ceramics are the "workhorse" for manufacturing ceramic components. They exhibit excellent mechanical properties, ultra-high melting points and hardness, corrosion resistance, strong chemical stability, high resistivity, and superior electrical insulation. They are commonly used to fabricate polishing plates, vacuum chucks, ceramic arms, and similar parts.

  • Why Silicon carbide(SiC) PVT Crystal Growth Cannot Do Without Tantalum Carbide Coatings(TaC)?

    In the process of growing silicon carbide (SiC) crystals via the Physical Vapor Transport (PVT) method, the extreme high temperature of 2000–2500 °C is a “double-edged sword” — while it drives the sublimation and transport of source materials, it also dramatically intensifies impurity release from all materials within the thermal field system, especially trace metallic elements contained in conventional graphite hot-zone components. Once these impurities enter the growth interface, they will directly damage the core quality of the crystal. This is the fundamental reason why tantalum carbide (TaC) coatings have become a “mandatory option” rather than an “optional choice” for PVT crystal growth.

  • VETEK Celebrates Topping-Out Ceremony of New Semiconductor Manufacturing Base

    VETEK celebrates the topping-out ceremony of its new semiconductor manufacturing base, expanding production capacity for advanced SiC, TaC and PyC coating technologies, Solid SiC components, high-purity graphite parts and semiconductor thermal field materials.

  • Do you know about MOCVD Susceptor?

    This article mainly introduces the product types, product characteristics and main functions of MOCVD Susceptor in semiconductor processing, and makes a comprehensive analysis and interpretation of MOCVD Susceptor products as a whole.

  • How to prepare CVD TaC coating? - Veteksemicon

    This article introduces the product characteristics of CVD TaC coating, the process of preparing CVD TaC coating using the CVD method, and the basic method for surface morphology detection of the prepared CVD TaC coating.

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