Materials & Design

Selecting the matched substrate and coating combination is the key to preventing premature component failure, reducing particle contamination, and maximizing wafer yield. We provide tailored material and structural design solutions around the customer's specific process window (operating temperature, reactive gas chemistry, ramp rates).

Our Core Design Capabilities:

• Rigorous CTE Stress Matching: For rapid thermal cycling (>100 °C/min), we precisely match the CTE temperature curves of high-purity graphite substrates and CVD coatings, fundamentally reducing the risk of coating delamination and micro-cracking.
• Process-Scenario-Specific Coating Selection: CVD SiC coating for Si/SiC epitaxy (Epi), MOCVD, and plasma etching environments; CVD TaC coating for higher-temperature and strongly corrosive conditions (e.g., SiC single-crystal PVT growth).
• Controllable Resistivity & Thermal Conductivity Optimization: Precise control of bulk resistivity and thermal conductivity of substrate and coating to meet specific electrical and thermal-field requirements of RF, ESC electrostatic chucks, or Heating Zones.
• Contamination Source Control & CoO Reduction: High-purity CVD deposition layers densely seal porous graphite, significantly reducing particle shedding, ultra-trace metal impurity diffusion, and high-temperature outgassing risk.

Typical Coating Selection Comparison (At-a-Glance Guide)

Real Case & Customer Benefits (Experience):

A leading SiC epitaxy (Epi) manufacturer: The original component used a mismatched CVD TaC coating, resulting in excessive interfacial stress and frequent micro-cracks at high temperature. We re-ran thermodynamic simulations and switched to a CTE-matched specialty high-purity graphite substrate + buffer layer + CVD SiC coating solution. Result: average component lifetime increased from 200 hours to 850 hours; annual replacement frequency per tool dropped from 40 to 9 times; comprehensive equipment O&M cost savings exceeded RMB 650,000 per year.

GDMS purity analysis report for TaC and SiC coatings

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