VeTek Semiconductor provide Special Graphite like Siliconized graphite, pyrolytic carbon, porous graphite, glassy carbon coating, high purity graphite sheet and high-purity isostatic graphite are several types of special graphite materials that share common characteristics and applications. Here's a brief introduction to their features and applications:
● Siliconized Graphite: Siliconized graphite is a special graphite material formed by combining graphite with silicon compounds. It exhibits excellent high-temperature resistance, corrosion resistance, and mechanical properties. Siliconized graphite is commonly used in high-temperature furnaces, corrosion-resistant equipment, and semiconductor manufacturing.
● Pyrolytic Carbon: Pyrolytic carbon is a carbon material obtained by high-temperature pyrolysis of organic substances such as coal and petroleum coke. It boasts high purity, density, strength, and low electrical conductivity. Pyrolytic carbon finds wide applications as high-temperature materials and structural components in semiconductor, chemical equipment, aerospace, and other fields.
● Porous Graphite: Porous graphite is a special graphite material with micro and mesoporous structures. It possesses a large specific surface area and porosity, offering excellent adsorption and thermal conductivity properties. Porous graphite is commonly used in gas separation, SiC crystal growth, and other applications.
● Glassy Carbon Coating: Glassy carbon coating refers to the technique of applying glassy carbon material as a surface coating. It exhibits outstanding corrosion resistance, wear resistance, and electrical conductivity. Glassy carbon coatings are frequently utilized in corrosion-resistant coatings, coating material for E-Beam Gun, and other semiconductor fields.
● High-Purity Isostatic Graphite: High-purity isostatic graphite is a high-purity special graphite material prepared through a high-temperature isostatic pressing process. It features a uniform microstructure, high density, and low oxygen content. High-purity isostatic graphite is extensively employed in precision machining, heat dissipation materials, semiconductor manufacturing, photovoltaics, aerospace, and other industries.
High-purity graphite paper is a specialized material used in the semiconductor industry. With its exceptional thermal and electrical conductivity, it plays a vital role in applications such as heat sinks, thermal interface materials, and electrical insulation. The lightweight and flexible nature of high-purity graphite paper make it ideal for enhancing thermal management and optimizing the performance of semiconductor devices. Its high purity (impurity below 5ppm) ensures reliable and efficient operation, making it a valuable component in the manufacturing and assembly of semiconductors.
These special graphite materials offer unique properties and application advantages in their respective fields. They play a critical role in high-temperature environments, corrosion resistance, electronics, energy, chemical engineering, aerospace, and semiconductor industries, providing essential support for advancements and innovations in these sectors.
Key Features
● Ultra-high purity options with impurity levels below 5 ppm for critical semiconductor processes.
● Excellent high-temperature stability and thermal shock resistance suitable for PVT SiC crystal growth and vacuum furnaces.
● Diverse material forms: isostatic graphite, porous graphite, siliconized graphite, PyC coating, glassy carbon coating and flexible graphite sheets.
● Superior corrosion resistance, wear resistance and controlled porosity for gas management and thermal field applications.
● In-house machining and coating capability (SiC / TaC / PyC) enabling one-stop customized solutions.
● Compatible with major semiconductor and crystal-growth equipment platforms.
Product Specifications
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Pyrolytic Carbon ( PyC ) Coating Parameter
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Item
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Unit
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value
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Crystal Structure
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-
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Hexagonal
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Alignment
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-
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Oriented or non-oriented along 001 direction
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Bulk Density
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g/cm³
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~2.24
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Microstructure
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-
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Polycrystalline/Multilayer graphene
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Hardness
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GPa
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1.1
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Elastic Modulus
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GPa
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10
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Typical Thickness
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μm
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30-100
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Surface Roughness
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μm
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1.5
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Product Purity
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ppm
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≤5ppm
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Applications
To meet the diverse needs of semiconductor and high-temperature processes, VeTek offers targeted Special Graphite products. The following table classifies them by major application areas, listing typical materials/components and applicable processes:
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Application Field
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Typical Materials / Products
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Application Description
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SiC Crystal Growth (PVT)
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Porous graphite, PyC coated graphite ring, isostatic graphite crucible, guide ring
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Used in PVT SiC crystal growth thermal fields; provides controlled vapor transport, high purity and thermal stability up to >2200°C, reducing particle contamination.
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Semiconductor Epitaxy / MOCVD
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heaters, PyC / glassy carbon coated parts
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High-purity thermal field components for Si/SiC/GaN epitaxy and MOCVD systems; excellent temperature uniformity and chemical inertness.
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High-Temperature Furnaces & Vacuum
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Graphite heaters, Three-petal Graphite Crucible
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Corrosion-resistant and thermally stable materials for vacuum furnaces, hot-zone heaters and high-temperature processing equipment.
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Thermal Management
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High purity graphite felt, Graphite paper
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Flexible, high thermal/electrical conductivity sheets for heat sinks, thermal interface materials and electrical insulation in semiconductor devices (impurity <5 ppm).
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Corrosion / Wear Protection
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Glassy carbon coating, siliconized graphite
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Surface coatings and bulk materials offering outstanding corrosion resistance, wear resistance and electrical conductivity for E-beam guns and harsh environments.
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Gas Separation & Adsorption
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Porous graphite
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Micro/mesoporous structure with large specific surface area for gas separation, filtration and controlled atmosphere applications.
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For more detailed product and process matching solutions, please refer to the related sub-category pages: Porous Graphite, Isotropic Graphite, Pyrolytic Carbon Coating etc.
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