Customized Graphite Heater For Hot Zone

Why Choose VETEK?

  ● Extreme Thermal Uniformity: VETEK heaters undergo precise structural simulation and design to ensure outstanding temperature consistency even in extreme environments up to 2200°C, effectively boosting wafer yield.

  ● High-Purity Material Assurance: We strictly select isostatic high-purity graphite, maintaining ash content at ultra-low levels to eliminate metal ion contamination at high temperatures from the source.

  ● Advanced Coating Technology: Leveraging VETEK’s core strengths, we offer optional SiC (Silicon Carbide) coatings. This significantly enhances oxidation and corrosion resistance, ensuring a longer service life in harsh chemical gas environments.

  ● Precision Customization: Whether it is cylindrical, spiral, or complex disc structures, VETEK provides high-precision machining based on your technical drawings to ensure a perfect fit with your equipment.

  ● Comprehensive Logistics Protection: Recognizing the fragile nature of graphite, VETEK has upgraded its packaging system. Our multi-layer anti-shock reinforcement ensures "zero damage" during international transit, eliminating concerns over production delays.

Core Application Fields

  ● Semiconductor Epitaxy: Core thermal field components for MOCVD equipment (compatible with mainstream models like the K465i).

  ● SiC Crystal Growth: Precision thermal field control for the growth of Silicon Carbide and other wide-bandgap semiconductor materials.

  ● High-Temperature Vacuum Equipment: Widely used in vacuum sintering furnaces, precision brazing, and high-end heat treatment equipment.

  ● Substrates for Advanced Coatings: Ideal base material for CVD SiC, SiN, or SiO coatings.

Technical Specifications

We also support customized materials with higher purity levels for specific operating conditions.

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