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Wangda Road, Ziyang Street, Wuyi County, Jinhua City, Zhejiang Province, China
VeTek Semiconductor is a leading manufacturer of high-quality graphite rigid felt, specializing in the development and production of innovative solutions for the photovoltaic and semiconductor industries. Our R&D team is composed of a group of experienced and innovative experts. We constantly explore new technologies and applications, committed to improving the performance of graphite rigid felt and meeting the evolving needs of the industry.
1. Ultimate purity
VeTek Semiconductor graphite rigid felt adopts advanced purification technology to ensure that the purity of the product reaches extremely high standards, effectively reducing the interference of impurities on the production process
2. Excellent thermal insulation performance
Graphite rigid felt has excellent thermal insulation effect, which can maintain stable thermal resistance in high temperature environments and greatly reduce energy loss
3. High strength and durability
The graphite rigid felt, carefully designed and optimized, has excellent mechanical strength and can withstand complex production environments and frequent use, extending its service life and reducing maintenance costs.
4. Accurate customization
VeTek Semiconductor provides customization services and produces graphite rigid felt products that fully meet customer's specific requirements in terms of size, shape, and performance.
-Photovoltaic industry: Graphite rigid felt has the characteristics of low thermal conductivity, high purity, and high thermal stability. It can be used as an insulation material in vacuum furnaces, inert gas furnaces, polycrystalline silicon/monocrystalline silicon furnaces and other equipment, effectively improving the insulation performance of the furnace body and reducing energy consumption.
-Semiconductor industry: mainly including silicon single crystal drawing furnaces, gallium arsenic product furnaces, etc.
Procure thermal-insulating Rigid Felt at Veteksemicon—trusted carbon fiber solution for structural insulation in semiconductor heat treatment systems.
Veteksemicon supplies rigid carbon felt insulation made from high-purity PAN-based carbon fibers, compression molded and resin-reinforced for dimensional stability. These materials provide excellent thermal insulation and low outgassing, ideal for semiconductor furnace chambers, hot zones, and thermal shielding in CVD, ALD, and MOCVD processes.
Rigid felt’s strong compressive strength and machinability make it suitable for forming customized insulation components such as plates, cylinders, and liners. It exhibits consistent thermal conductivity, high-temperature resistance (up to 2800°C in vacuum or inert atmospheres), and excellent plasma resistance, ensuring long-term insulation performance in aggressive process conditions.
Available in various densities and thicknesses, Veteksemicon’s rigid felt solutions support precise heat containment, energy efficiency, and process uniformity across vertical and horizontal reactor setups.
To request specifications or explore product configurations, visit the Veteksemicon Rigid Felt page or reach out for technical consultation.
+86-579-87223657
Wangda Road, Ziyang Street, Wuyi County, Jinhua City, Zhejiang Province, China
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