Silicon Carbide Ceramics

VeTek Semiconductor is your innovative partner in the field of semiconductor processing. With our extensive portfolio of semiconductor-grade Silicon Carbide Ceramics material combinations, component manufacturing capabilities, and application engineering services, we can help you overcome significant challenges. Engineering technical Silicon Carbide Ceramics are widely applied in the semiconductor industry due to their exceptional material performance. VeTek Semiconductor's ultra-pure Silicon Carbide Ceramics are frequently used throughout the entire cycle of semiconductor manufacturing and processing.

DIFFUSION & LPCVD PROCESSING

VeTek Semiconductor provides engineered ceramics components specifically designed for batch diffusion and LPCVD requirements including:

• Baffles & holders
• Injectors
• Liners & process tubes
• Silicon Carbide Cantilever Paddles
• Wafer boats and pedestals

SiC Cantilever Paddle SiC Process Tubes Silicon Carbide Process Tube SiC vertical wafer boat SiC horizontal wafer boat SiC horizontals quare wafer boat SiC LPCVD wafer boat SiC horizontal plate boat SiC Ceramic Seal Ring

ETCH PROCESS COMPONENTS

Minimize contamination and unscheduled maintenance with high- purity components engineered for the rigors of plasma etch processing, including:

RAPID THERMAL PROCESSING & EPITAXIAL PROCESS COMPONENTS

VeTek Semiconductor provides advanced material components tailored for high-temperature thermal processing applications in the semiconductor industry. These applications encompass RTP, Epi processes, diffusion, oxidation, and annealing. Our technical ceramics are designed to withstand thermal shocks, delivering reliable and consistent performance. With VeTek Semiconductor's components, semiconductor manufacturers can achieve efficient and high-quality thermal processing, contributing to the overall success of semiconductor production.