Silicon Cassette Boat

The Silicon Cassette Boat offered by Veteksemicon is engineered for the rigorous thermal, mechanical, and contamination-control requirements of modern semiconductor wafer fabrication. Manufactured from ultra-high-purity monocrystalline or polysilicon and processed to industry-leading cleanliness standards, the Silicon Cassette Boat functions as a critical carrier system for wafers undergoing oxidation, diffusion, annealing, and other furnace-based thermal cycles. Its intrinsic material properties—chemical inertness at elevated temperatures, matched thermal expansion with silicon wafers, and extremely low metallic impurity concentration—enable it to minimize particle generation and thermal stress, ensuring the uniformity and repeatability essential for sub-micron and advanced-node production.

Within vertical and horizontal furnace platforms, the Silicon Cassette Boat provides precise wafer spacing and stable mechanical support, allowing consistent heat transfer and uniform gas flow across the entire batch. By eliminating cross-material interactions commonly associated with quartz or ceramic carriers, it helps safeguard wafer surfaces from contamination during long high-temperature soaks, even at temperatures approaching 1200°C. This material alignment between the carrier and the substrate also reduces slip lines, micro-cracks, and warpage, making the boat particularly advantageous for applications such as thick-oxide growth, drive-in diffusion, high-temperature implantation anneal, and power-device epitaxial processing.

Designed to integrate seamlessly with automated loading systems, FOUP-to-furnace transfer modules, and robotic wafer handling, Veteksemicon’s Silicon Cassette Boat supports both 200 mm and 300 mm manufacturing environments and complies with leading-edge furnace OEM specifications. Its high dimensional precision, optimized slot geometry, and advanced surface finishing contribute to superior thermal uniformity, reduced defectivity, and extended operational lifetime—factors that directly enhance process yield and equipment uptime.

Backed by Veteksemicon’s materials science expertise and strict quality management, the Silicon Cassette Boat delivers stable performance across multiple thermal cycles, low particle shedding, and predictable behavior in demanding high-temperature atmospheres such as O₂, H₂, N₂, or inert gas mixtures. For fabs requiring enhanced contamination control, predictable thermal profiles, and compatibility with next-generation device manufacturing, the Silicon Cassette Boat strengthens process reliability, improves wafer-level uniformity, and enables consistent high-volume semiconductor production.