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Wangda Road, Ziyang Street, Wuyi County, Jinhua City, Zhejiang Province, China
VeTek Semiconductor is professional manufacturer of high-quality graphite soft felt, specializing in the development and production of innovative solutions for the photovoltaic and semiconductor industries. Our R&D team is composed of a group of experienced and innovative experts. We constantly explore new technologies and applications, committed to improving the performance of graphite soft felt and meeting the evolving needs of the industry.
1. Excellent insulation performance: It can effectively reduce heat loss, maintain a stable temperature environment inside the equipment, and reduce energy consumption.
2. Good high-temperature resistance: soft felt is able to maintain stable physical and chemical properties under high temperature conditions, and can withstand high temperature environments in photovoltaic and semiconductor production processes.
3. Low thermal conductivity: helps to achieve precise temperature control, improve process stability and product quality.
4. High chemical stability: It has good resistance to most chemical substances and is not easily corroded or contaminated.
5. High purity: reduces the interference of impurities on photovoltaic and semiconductor production processes, ensuring product performance and quality.
6. Good thermal shock resistance: able to withstand rapid temperature changes and not easily rupture or damage.
1. Thermal field components of single crystal furnace: In a Czochralski single crystal furnace, graphite soft felt can be used as insulation material to effectively maintain the temperature gradient inside the furnace, improve the quality and stability of crystal growth.
2. Polycrystalline ingot furnace: As a thermal insulation material, it reduces heat loss, optimizes thermal field distribution, and helps improve the quality and production efficiency of polycrystalline silicon ingots.
3. Diffusion furnace: used for insulation, ensuring temperature uniformity inside the furnace, and improving the accuracy and consistency of diffusion processes.
4. Epitaxial furnace: provides a stable thermal environment for the epitaxial growth process, reducing the impact of temperature fluctuations on the quality of semiconductor epitaxial layers.
5. Semiconductor packaging: In some high-end semiconductor packaging processes, it plays a role in insulation, buffering, and support, protecting chips from thermal and mechanical stress damage.
6. Photovoltaic cell manufacturing equipment: such as plasma enhanced chemical vapor deposition (PECVD) equipment, used to maintain temperature stability inside the equipment and ensure the quality of thin film deposition.
Buy premium-grade Soft Felt insulation at Veteksemicon—ideal for flexible thermal barriers in semiconductor vacuum furnaces and coating systems.
At Veteksemicon, our soft carbon felt is crafted from ultra-fine PAN or rayon-based carbon fibers, offering superior flexibility, low bulk density, and excellent thermal insulation properties. This lightweight material is used as a compressible thermal barrier in hot zones, gas distribution assemblies, and vacuum insulation panels in high-temperature semiconductor equipment.
Key applications include linings for graphite heaters, insulation wraps for quartz tubes, and padding layers in epitaxy and diffusion chambers. The material demonstrates low thermal conductivity, minimal outgassing, and excellent compatibility with high-purity and inert process environments.
Soft felt can be easily cut, layered, or stitched into complex shapes, making it highly versatile in R&D or customized tool builds. It also functions well as an intermediate thermal buffer to reduce edge loss or prevent heat bridging.
Explore full technical specs and flexible form factors on the Veteksemicon Soft Felt product page or contact our team for engineered solutions.
+86-579-87223657
Wangda Road, Ziyang Street, Wuyi County, Jinhua City, Zhejiang Province, China
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