From the manufacturing process of electrostatic suction cups to mass production manufacturers

The Dechuck principle of the Electrostatic Chuck is a key part of its workflow that involves electrostatic force elimination and wafer release mechanisms. The following is a detailed analysis:

Dechuck's core is to eliminate or neutralize the electrostatic force adsorbed on the wafer, and the specific methods include:

Youdaoplaceholder0 Cut off the power

Stop applying a direct current voltage to the electrode to gradually eliminate the electric field.

Youdaoplaceholder0 Reverse voltage or gas injection ‌

Some systems will apply reverse voltage or introduce inert gases (such as He, N₂) to accelerate charge neutralization or physical separation.

Let's compare the professional techniques of ESC production and first see if the company can reach such a scale.

CAE analysis technology, plate functional materials, electrode design, analysis technology, cooling channel technology, heater design technology, senior personnel in semiconductor equipment.

Japanese and South Korean companies must be fully staffed with such relevant personnel. If not, there is no need to talk about the company's technology.

The chuck technology, electrodes, discs and even the he flow principle haven't been clarified yet. Let's make a rough electrostatic suction cup. Such companies are directly passed on. They are basically used to rein in investors' money. This is the basic level of know how. Investors should also give up on a company that plays with card games and has no employees with over 10 years of experience in etching equipment, because this is not a company that does practical things.

When it comes to powder firing in the industry, everyone is in the same field. Each has its own unique formula. Which one doesn't have the strength to be equipped with sintered ceramic surfaces? Investors can also pass on these configurations or companies that haven't fully grasped them, because their fundamental logic is the same: they aim to make money, not to develop products.

Regarding repair, many domestic companies should have the corresponding capabilities for L1 to L3 by now. Even if the capabilities are a bit lacking, L1 can still handle it. For L3 and above, either it can't be repaired or it can be subcontracted. In any case, there is still a way to repair it.

L1 Repair Surface repair, surface roughness improvement/flatness improvement/bump regeneration.

L2 Repair: Joint layer repair, rebonding of metal base and ceramic disc/re-filling of joint layer.

L3 Repair Ceramic disk replacement, ceramic disk manufacturing/Rebonding of metal base and ceramic disk.

Guangdong Haituo Innovation Precision Equipment Technology Co., LTD

The company holds a leading position in the design and production of domestic electrostatic chucks and equipment based on electrostatic chucks as the core technology. At present, Haituo Innovation has achieved commercial production of electrostatic suction cups and has completed the delivery of 4-inch to 12-inch semiconductor FAB electrostatic chucks.

Beijing Huazhuo Jingke Technology Co., LTD

The electrostatic suction cups independently developed by the company comply with the relevant standards and processing requirements of the semiconductor industry. The 12-inch PVD aluminum nitride electrostatic suction cups developed in the early stage have, to a certain extent, broken the long-term monopoly of foreign manufacturers in this product field. At present, Huazhuo Jingke has applied the related technology of electrostatic suction cups to product manufacturing and achieved small-scale mass production. It can also provide customized products for customers.

Founded in 2016, is a leading provider of advanced coating materials for the semiconductor industry. Our founder, a former expert from the Chinese Academy of Sciences' Institute of Materials, established the company with a focus on developing cutting-edge solutions for the industry.

Our main product offerings include CVD silicon carbide (SiC) coatings, tantalum carbide (TaC) coatings, bulk SiC, SiC powders, and high-purity SiC materials. The main products are SiC coated graphite susceptor, preheat rings, TaC coated diversion ring, halfmoon parts, etc., the purity is below 5ppm, can meet customer requirements.

Zhejiang Xinna Materials Technology Co., LTD

The electrostatic suction cup products developed by it have performance indicators that can meet the demands of chip manufacturing enterprises. They feature outstanding properties such as controllable temperature, uniform adsorption force, no scratches or wrinkles during adsorption, and no edge exclusion effect on wafers. They have been certified by leading domestic semiconductor industry enterprises such as Yangtze Memory Technologies, Silan Microelectronics, and North China Innovation and have achieved sales. It has broken the monopoly of foreign manufacturers in this product field.

Hebei Zhongci Electronic Technology Co., LTD

In 2022, the company made strategic moves in the field of precision ceramic components, achieving the localization of highly technical precision parts such as heating plates and electrostatic chucks. The core technical indicators of the ceramic heating plates developed by Zhongci Electronics have reached the level of similar international products and have been verified by users. They have been applied in batches in key domestic semiconductor equipment. Ceramic heating plates have been delivered in bulk, and electrostatic chucks have been sent for sample testing.