What is a PECVD graphite boat ?

Ⅰ. What is the material of PECVD Graphite Boat?

The core material of PECVD graphite boat (Plasma Enhanced Chemical Vapor Deposition graphite boat) is made of high-purity isotropic graphite material (purity is usually ≥99.999%), and is modified by special processes (such as chemical vapor deposition CVD or surface coating). High-purity graphite is widely used in PECVD systems due to its excellent electrical conductivity and high thermal conductivity (80~150 W/m·K). This high-purity graphite material can maintain good structural stability and chemical stability in high temperature environments, and can resist corrosion from reactive gases and plasma.

Ⅱ. What are the physical properties of Graphite Boat?

The physical properties of PECVD graphite boats include:

●  Electrical conductivity: Isostatic graphite has excellent electrical conductivity, which enables it to effectively manage electrical energy and promote the generation and maintenance of plasma during the PECVD process.

●  Thermal conductivity: The high thermal conductivity of graphite (about 80~150 W/m·K) helps maintain a stable temperature environment during the PECVD process and ensure uniform deposition of thin films.

●  Density: The density of commercial polycrystalline graphite ranges from 1.30 g/cm³ to 1.88 g/cm³. The higher the density, the better the physical and mechanical properties, which can improve the service life of the product.

Ⅲ. What are the advantages of PECVD Graphite Boat compared to ordinary graphite boat?

Compared with ordinary graphite boats, PECVD graphite boats have the following advantages:

Ⅳ. Why choose Veteksemicon's PECVD graphite boat?

As we all know, Veteksemicon is a leading manufacturer and supplier of semiconductor coating products and graphite products in China. Our PECVD graphite boats are mainly used in the semiconductor and photovoltaic industries, especially in PECVD and CVD processes.

Graphite boats are usually used as carriers to carry silicon wafers or other materials to ensure safe handling and transportation of these materials in high temperature and plasma environments. For example, in the semiconductor manufacturing process, Veteksemicon's PECVD graphite boats are designed for plasma enhanced chemical vapor deposition processes. The graphite boat plays the role of depositing silicon nitride (SiNₓ) passivation layers and low dielectric constant (Low-k) films.

In the photovoltaic field, PECVD graphite boats are used to prepare silicon-based thin-film solar cells (such as amorphous silicon a-Si:H ) and PERC cell back passivation layers. Veteksemicon's PECVD graphite boat optimizes the coating process by effectively spacing silicon wafers and inducing glow discharge to achieve uniform coating deposition.

More importantly, Veteksemicon can provide customized products and technical services, and can design and manufacture graphite boat products of different specifications according to your actual process requirements. Choosing Veteksemicon means choosing an industry leader with strong strength in the semiconductor and photovoltaic industries. We sincerely look forward to becoming your long-term partner.