PECVD Graphite Boat

Veteksemicon is a professional China PECVD graphite boat manufacturer and supplier.

What is the role of VeTek Semiconductor's solar cell (coating) PECVD graphite boat?

As a carrier of normal silicon wafers produced by the coating process, the graphite boat has many boat wafers with certain intervals in the structure, and there is a very narrow space between the two adjacent boat wafers, and the silicon wafers are placed on both sides of the empty door.

Because the PECVD graphite boat material graphite has good electrical and thermal conductivity properties, the AC voltage is asked in the two adjacent boats, so that the two adjacent boats form positive and negative poles, when there is a certain pressure and gas in the chamber, glow discharge occurs between the two boats, glow discharge can decompose the SiH4 and NH3 gas in the space, forming Si and N ions. SiNx molecules are formed and deposited on the surface of silicon wafer to achieve the purpose of coating.

PECVD Graphite boats are usually used as carriers to carry silicon wafers or other materials to ensure safe handling and transportation of these materials in high temperature and plasma environments. For example, in the semiconductor manufacturing process, Veteksemicon's PECVD graphite boats are designed for plasma enhanced chemical vapor deposition processes. The graphite boat plays the role of depositing silicon nitride (SiNₓ) passivation layers and low dielectric constant (Low-k) films.

In the photovoltaic field, PECVD graphite boats are used to prepare silicon-based thin-film solar cells (such as amorphous silicon a-Si:H ) and PERC cell back passivation layers. Veteksemicon's PECVD graphite boat optimizes the coating process by effectively spacing silicon wafers and inducing glow discharge to achieve uniform coating deposition.

More importantly, Veteksemicon can provide customized products and technical services, and can design and manufacture graphite boat products of different specifications according to your actual process requirements. We sincerely look forward to becoming your long-term partner.

And the advantages of PECVD Graphite Boat compared to ordinary graphite boat, just click