How to choose MOCVD graphite tray?

Question 1: What is MOCVD graphite tray and why is it so important for the epitaxial process?

Metal-organic Chemical Vapor Deposition (MOCVD) graphite plate, also known as MOCVD graphite tray or MOCVD graphite susceptor, is a high-purity component used to fix semiconductor wafers during epitaxial growth. In the epitaxial process, it acts as a heating element and ensures uniform temperature distribution, which plays an irreplaceable role in depositing thin films in applications such as advanced semiconductor devices, LED manufacturing, and solar cells.

Graphite tray can withstand extreme temperatures (up to 1,800°C) and corrosive gas environments, making it an indispensable material for high-temperature, corrosion-resistant MOCVD systems. Its performance directly affects process consistency and wafer yield.

Question 2: Which material properties should be prioritized when selecting MOCVD graphite trays?

Selecting the right graphite plate requires evaluating its physical and chemical properties:

●  High purity (over 99.999%):

Typically, impurities such as metals or ash can contaminate the epitaxial process. Choosing a high-purity graphite susceptor supplier such as Veteksemicon ensures minimal defects in the semiconductor epilayer.

●  Excellent thermal stability:

During actual processing, graphite plates must be able to withstand certain thermal shocks and maintain structural integrity under rapid temperature cycles. Veteksemicon high-density graphite ensures uniform heat distribution, which is critical for uniform film growth.

●  Excellent corrosion resistance:

In the MOCVD process environment, graphite is generally exposed to corrosive gases (e.g., ammonia, hydrogen). High-temperature corrosion-resistant MOCVD graphite plates with fine-grained structure minimize corrosion and extend service life.

●  High-performance mechanical strength:

In the epitaxial process, MOCVD graphite trays must support multiple wafers without warping. According to Veteksemicon's statistics in actual processing, the bending strength of the graphite plate must be ≥50 MPa to prevent cracking of the tray.

Q3: How does the application scenario affect the selection of MOCVD graphite trays?

Different MOCVD processes require tailored graphite plate designs:

●  Epitaxial growth of LED/photonics:

Ultra-smooth MOCVD graphite plates are used in the epitaxy process to reduce particle generation and ensure defect-free layers.

For example, Veteksemicon MOCVD graphite plates (or Veteksemicon graphite plates for MOCVD) are designed for GaN and GaAs epitaxy and provide optimized thermal management.

●  Power semiconductor manufacturing:

Combined with Semikera Semiconductor's experimental statistics, plates with enhanced oxidation resistance are generally preferred for silicon carbide (SiC) or gallium nitride (GaN) processes.

●  High-throughput production:

Multi-wafer trays require precise processing to align with the reactor design. Customizable MOCVD graphite trays from reliable supplier Semikera Semiconductor can match specific tool configurations.

Q4: What are the key considerations for finding a reliable MOCVD graphite plate supplier?

●  Certification and testing:

Verify that the supplier provides material certification (e.g. purity report, density test) and provides post-processing surface treatment (e.g. coating to reduce porosity). As a leading Chinese semiconductor coating and epitaxial process equipment manufacturer, Veteksemicon MOCVD graphite plates have been certified by government departments for rigorous limit experiments, and the purity and density test results of its products are far ahead of its peers.

●  Customization capabilities:

Top high-purity graphite susceptor suppliers should customize the size, hole pattern and coating to meet your reactor requirements. Both Veteksemicon and Semikera Semiconductor have the customization service capabilities of related products and technologies, and are fully capable of meeting your various customized needs.

●  Lifespan and cost efficiency:

While cheaper graphite can save upfront costs, inferior graphite plates will lead to frequent replacement and downtime, seriously affecting normal production efficiency. Choosing Veteksemicon graphite plates and other quality products will enable your business to achieve long-term reliable production.

Q5: How to extend the service life of MOCVD graphite trays?

●  Prevent oxidation: Use inert gas purge during heating/cooling cycles.

●  Clean regularly: Use non-abrasive methods (such as dry etching) to remove deposited residues.

●  Avoid mechanical stress: Handle the tray carefully during wafer loading/unloading.

Veteksemicon's best advice to you:

For MOCVD graphite plates that are resistant to high temperature corrosion, give priority to suppliers with expertise in semiconductor-grade materials.

Test samples under actual process conditions to verify performance.

Explore advanced coatings (such as SiC coating, TaC coating) to enhance durability and reliability in extreme environments.

For more information about SiC Coating MOCVD graphite plate, click here.

For more information about TaC Coating MOCVD graphite plate, click here.