CVD SiC Graphite Cylinder

Vetek Semiconductor's CVD SiC Graphite Cylinder plays an important role in semiconductor equipment. It is usually used as a protective cover inside the reactor to provide protection for the internal components of the reactor in high temperature and high pressure environments. This protective cover can effectively isolate the chemicals and high temperatures in the reactor, preventing them from causing damage to the equipment. At the same time, CVD SiC Graphite Cylinder also has excellent wear and corrosion resistance, making it able to maintain stability and long-term durability in harsh working environments. By using protective covers made of this material, the performance and reliability of semiconductor devices can be improved, extending the service life of the device while reducing maintenance needs and the risk of damage.

CVD SiC Graphite Cylinder is widely used in semiconductor equipment, covering the following key areas:

Heat treatment equipment

It serves as a protective cover or heat shield in heat treatment equipment. This not only safeguards internal components from high temperature damage but also boasts excellent high temperature resistance.

Chemical Vapor Deposition (CVD) reactors

In CVD reactors, it acts as a protective cover for the chemical reaction chamber. It effectively isolates reaction substances and offers good corrosion resistance.

Corrosive environments

Thanks to its outstanding corrosion resistance, CVD SiC Graphite Cylinder can be utilized in chemically corrosive settings during semiconductor manufacturing, such as environments with corrosive gases or liquids.

Semiconductor growth equipment

It functions as protective covers or other components in semiconductor growth equipment. By protecting the equipment from high temperatures, chemical corrosion, and wear, it ensures the equipment's stability and long - term reliability.

Characterized by high - temperature stability, corrosion resistance, excellent mechanical properties, and good thermal conductivity, CVD SiC Graphite Cylinder facilitates more efficient heat dissipation in semiconductor devices, thus maintaining device stability and performance.