Silicon Carbide SiC wafer boat

Veteksemicon SiC wafer boat is a core carrier designed specifically for high-temperature semiconductor processes. Utilizing high-purity isostatically pressed graphite as its substrate, this product utilizes patented chemical vapor deposition technology to form a dense, non-porous silicon carbide protective layer on the surface.

This layer seamlessly combines the excellent thermal conductivity of graphite with the exceptional corrosion resistance of silicon carbide. The rigorously controlled coating achieves a thickness of 80-120μm, effectively resisting corrosion from various acidic and alkaline atmospheres, significantly reducing the risk of metal contamination. It maintains structural stability and dimensional integrity even in high-temperature environments, providing reliable protection and support for wafers during critical processes such as oxidation, diffusion, and epitaxial growth, effectively extending the wafer lifespan by more than three times that of conventional graphite boats.

Ⅰ. Technical Parameters

Ⅱ . Veteksemicon SiC wafer boat core advantages

Excellent corrosion resistance

The SiC coating on the Veteksemicon Wafer Boat is deposited using our proprietary high-temperature CVD process, resulting in a dense, uniform structure that is completely free of pores and cracks. This solid barrier effectively isolates the wafers from the furnace environment. Strong oxidizing atmospheres, fluorinated compounds, and other corrosive gases are impervious to this protective layer. This means your wafers are protected from contamination, while the boat itself remains intact through repeated extreme processes, significantly extending its service life.

Ultra-high purity materials

We understand that even the slightest contamination can render an entire batch of wafers useless. Therefore, Veteksemicon rigorously controls raw materials, using imported isostatically pressed graphite with a purity exceeding 99.9995% as a substrate. The SiC coating deposited on this substrate also achieves 99.999% purity, with critical impurities like sodium, potassium, iron, and heavy metals kept to extremely low levels (ppb). This near-intrinsic purity ensures no contaminants are released at high temperatures, fundamentally eliminating the risk of device performance degradation due to carrier-related issues.

Excellent thermal stability

Semiconductor manufacturing requires extremely consistent thermal processes. Veteksemicon Wafer Boat's coefficient of thermal expansion is meticulously designed to closely match that of silicon wafers. During rapid heating and cooling, the boat and wafer move in sync, significantly reducing the risk of lattice defects and warping caused by thermal stress. It can withstand continuous operating temperatures up to 1600℃, maintaining excellent mechanical strength and dimensional stability even at these high temperatures. This ensures repeatability and reliability in every process run, providing a solid foundation for tolerance control in chip manufacturing.

Durable mechanical strength

The value of our products lies not only in the initial investment but also in the long-term cost of ownership. Compared to traditional quartz or graphite components, Veteksemicon SiC wafer boats offer exceptional wear and impact resistance. Their high surface hardness resists scratches and debris during handling and cleaning. This toughness enables them to easily withstand over 200 high-temperature process cycles and necessary cleaning procedures, significantly reducing procurement costs, inventory costs, and equipment downtime associated with frequent component replacement.

Ecological chain verification endorsement

Veteksemicon SiC wafer boat' ecological chain verification covers raw materials to production, has passed international standard certification, and has a number of patented technologies to ensure its reliability and sustainability in the semiconductor and new energy fields.

Ⅲ . Main application fields

For detailed technical specifications, white papers, or sample testing arrangements, please contact our Technical Support Team to explore how Veteksemicon can enhance your process efficiency.

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