VEECO LED EPI Susceptor

LED is a solid-state semiconductor device that can convert electrical energy into visible light. By applying a forward voltage to the P-N junction, electrons and holes are recombined at the P-N junction. When electrons jump from a high energy level to a low energy level, energy is released, which is emitted in the form of photons, thereby generating light. Different semiconductor materials emit different colors of light. LED has high luminous efficiency and can directly convert most electrical energy into light energy. It usually has a long service life and is very environmentally friendly.

Aluminum gallium indium phosphide (AlGaInP) is the main material for making red and yellow LEDs. By adjusting the composition ratio of aluminum (Al), gallium (Ga), indium (In) and phosphorus (P) in the material, the band gap of the material can be changed, thereby achieving light emission from red to yellow. In the manufacturing process, epitaxial growth is a key step. AlGaInP epitaxy usually adopts metal organic chemical vapor deposition (MOCVD) technology. When growing the epitaxial layer of red LED, the ratio and reaction conditions of raw materials such as trimethylaluminum, trimethylgallium, trimethylindium and phosphine are controlled so that the final material can emit red light.

Even distribution and effective control of heat are critical in the epitaxial growth process of Red and Yellow LEDs. VeTek Semiconductor's VEECO LED EPI Susceptor has excellent thermal conductivity, which can quickly and evenly conduct heat to ensure minimal deviation in temperature uniformity across the entire wafer surface. Significantly improve the growth rate and quality of the epilayer.

Using SGL graphite and advanced CVD SiC coating technology, VeTek Semiconductor's VEECO LED EPI Susceptor has excellent durability. It is indistinguishable from the original Susceptor to the greatest extent. It always maintains stability during long-term, high-intensity MOCVD production processes. VeTek Semiconductor's VEECO LED EPI Susceptor demonstrates strong resistance to corrosion and deformation. This means that companies do not need to frequently replace the susceptor, greatly reducing the maintenance cost and downtime of production equipment.

VeTek Semiconductor fully considers the individual needs of different customers in the red and yellow LED manufacturing process. VeTek Semiconductor can provide customized VEECO LED EPI Susceptor solutions for wafer production of specific sizes or special process parameters.

VeTek Semiconductor's professional technical team will communicate with customers in depth to tailor the most suitable Susceptor products according to their specific application scenarios, equipment configurations and production goals, helping companies achieve technological breakthroughs and product upgrades.

SEM DATA OF CVD SIC COATING FILM:

Basic physical properties of CVD SiC coating:

VeTek Semiconductor VEECO LED EPI Susceptor products shops: