Products
SiC Coating Cover Segments
  • SiC Coating Cover SegmentsSiC Coating Cover Segments

SiC Coating Cover Segments

Vtech Semiconductor is committed to the development and commercialization of CVD SiC coated parts for Aixtron reactors. As an example, our SiC Coating Cover Segments have been carefully processed to produce a dense CVD SiC coating with excellent corrosion resistance, chemical stability, welcome to discuss application scenarios with us.

You can rest assured to buy SiC Coating Cover Segments from our factory. Micro LEDs technology is disrupting the existing LED ecosystem with methods and approaches that have until now only been seen in the LCD or semiconductor industries. The Aixtron G5 MOCVD system perfectly supports these stringent extensional requirements. It is a powerful MOCVD reactor designed primarily for silicon-based GaN epitaxy growth.


Aixtron G5 is a horizontal Planetary disk epitaxy system, mainly consisting of components such as the CVD SiC coating Planetary disc, MOCVD susceptor, SiC Coating Cover Segments, SiC coating cover ring, SiC coating ceiling, SiC coating supporting ring, SiC coating cover disc, SiC coating exhaust collector, pin washer, collector inlet ring, etc.


As a CVD SiC coating manufacturer, VeTek Semiconductor offers Aixtron G5 SiC Coating Cover Segments. These susceptors are made of high purity graphite and feature a CVD SiC coating with impurity below 5ppm.


CVD SiC Coating Cover Segments products exhibit excellent corrosion resistance, superior thermal conductivity, and high-temperature stability. These products effectively resist chemical corrosion and oxidation, ensuring durability and stability in harsh environments. The outstanding thermal conductivity enables efficient heat transfer, enhancing thermal management efficiency. 


With their high-temperature stability and resistance to thermal shock, CVD SiC coatings can withstand extreme conditions. They prevent graphite substrate dissolution and oxidation, reducing contamination and improving production efficiency and product quality. The flat and uniform coating surface provides a solid foundation for film growth, minimizing defects caused by lattice mismatch and enhancing film crystallinity and quality. In summary, CVD SiC coated graphite products offer reliable material solutions for various industrial applications, combining exceptional corrosion resistance, thermal conductivity, and high-temperature stability.


SEM DATA OF CVD SIC FILM

SEM DATA OF CVD SIC FILM

Basic physical properties of CVD SiC coating:

Basic physical properties of CVD SiC coating
Property Typical Value
Crystal Structure FCC β phase polycrystalline, mainly (111) oriented
SiC coating Density 3.21 g/cm³
CVD SiC coating Hardness 2500 Vickers hardness(500g load)
Grain SiZe 2~10μm
Chemical Purity 99.99995%
Heat Capacity 640 J·kg-1·K-1
Sublimation Temperature 2700℃
Flexural Strength 415 MPa RT 4-point
Young' s Modulus 430 Gpa 4pt bend, 1300℃
Thermal Conductivity 300W·m-1·K-1
Thermal Expansion(CTE) 4.5×10-6·K-1

VeTek semiconductor SiC Coating Cover Segments product shops:

SiC Coated Wafer CarrierAixtron equipmentCVD SiC Focus RingSemiconductor process Equipment

Overview of the Semiconductor Chip Epitaxy Industry Chain:

SiC Epitaxy Si Epitaxy GaN Epitaxy

Hot Tags: SiC Coating Cover Segments
Send Inquiry
Contact Info
For inquiries about Silicon Carbide Coating, Tantalum Carbide Coating, Special Graphite or price list, please leave your email to us and we will be in touch within 24 hours.
X
We use cookies to offer you a better browsing experience, analyze site traffic and personalize content. By using this site, you agree to our use of cookies. Privacy Policy
Reject Accept