Silicon carbide Cantilever Paddle for Wafer Processing

General product information

Product business terms

Application: Veteksemicon SiC paddles are key components in advanced semiconductor manufacturing, designed for core processes such as SiC power device epitaxy, high-temperature annealing, and gate oxidation for silicon-based chips.

Services that can be provided: customer application scenario analysis, matching materials, technical problem solving.

Company profile：Veteksemicon has 2 laboratories, a team of experts with 20 years of material experience, with R&D and production, testing and verification capabilities.

Technical Parameters

Veteksemi SiC Paddles core advantages

 ● Ultimate purity, protecting chip yield

We use advanced processes to produce silicon carbide raw materials, ensuring minimal metallic impurities. Veteksemi SiC Paddles effectively suppress impurity precipitation in high-temperature environments for extended periods, preventing contamination of sensitive wafers and ensuring high-yield production from the source.

● Excellent heat resistance to meet extreme challenges

Silicon carbide itself has high-temperature resistance properties that surpass most ceramic materials. Our Paddles can easily handle process temperatures up to 1600°C, have an extremely low thermal expansion coefficient, and exhibit exceptional thermal shock resistance during repeated rapid heating and cooling cycles, minimizing the risk of deformation and cracking and extending service life.

● Extraordinary mechanical strength to ensure stable transmission

With extremely high rigidity and hardness, it maintains excellent morphological stability even when fully loaded with wafers. This ensures precise alignment of wafers during automated transfer, allowing them to smoothly enter and exit the furnace, reducing the risk of breakage due to vibration or deviation.

● Excellent corrosion resistance, extended service life

VetekSemicon SiC paddles exhibit strong chemical inertness in the presence of corrosive atmospheres such as oxygen and hydrogen commonly found in oxidation and diffusion processes, with extremely low surface erosion rates. This ensures stable dimensions and performance over long-term use, significantly reducing your overall cost of ownership.

Main application fields

Ecological chain verification endorsement

Veteksemicon SiC paddles' ecological chain verification covers raw materials to production, has passed international standard certification, and has a number of patented technologies to ensure its reliability and sustainability in the semiconductor and new energy fields.

For detailed technical specifications, white papers, or sample testing arrangements, please contact our Technical Support Team to explore how Veteksemicon can enhance your process efficiency.