Silicon Carbide Robot Arm

Veteksemicon's silicon carbide robotic arm is a high-end semiconductor processing solution designed specifically for harsh industrial environments. Utilizing advanced high-purity silicon carbide material technology, it demonstrates exceptional stability and durability in high temperatures, corrosive environments, and ultra-high vacuum conditions. As a key component in wafer handling, etching, and deposition processes, our robotic arm significantly improves productivity and reduces maintenance costs.

Ⅰ. Technical Parameters

Ⅱ . Veteksemicon Silicon Carbide Robot Arm core advantages

1. Extreme environment tolerance

Our robot arm uses a uniquely formulated SiC coating that undergoes multiple high-temperature deposition processes, enabling it to maintain structural integrity at sustained temperatures of 1500°C and effectively resist corrosion from plasma bombardment and strong acid and alkaline environments. This fundamentally addresses the pain points of traditional materials that are prone to aging and have a short lifespan under extreme working conditions.

2. Excellent mechanical properties

By adopting a composite structure of graphite substrate and SiC coating, we have achieved a rigidity far exceeding that of metal materials while ensuring the arm is extremely lightweight. This design ensures that the deformation of the robot arm is extremely small during high-speed reciprocating motion, effectively suppressing jitter, thereby firmly controlling the repeat positioning accuracy within ±0.02mm, ensuring the safe transmission of precision wafers.

3. Ultra-high cleanliness

We understand that particulate contamination is the number one killer of yield. Therefore, each robot arm undergoes precision polishing and specialized surface treatment, resulting in a surface roughness Ra of less than 0.1μm. The coating adheres securely, preventing any risk of peeling. Our products are 100% cleanliness-tested, fully meeting ultra-high cleanroom requirements and ready for use in state-of-the-art production lines.

4. Long service life

Thanks to SiC's inherent hardness of 3000 HV and excellent wear resistance, our robot arms experience minimal performance degradation even after tens of thousands of motion cycles. Their service life is several times that of ordinary ceramic or aluminum alloy components, significantly reducing downtime for replacement and maintenance, delivering significant overall cost-effectiveness for our customers.

Ⅲ . Main application fields

Veteksemicon Silicon Carbide Robot Arm' ecological chain verification covers raw materials to production, has passed international standard certification, and has a number of patented technologies to ensure its reliability and sustainability in the semiconductor and new energy fields. Welcome to consult us at any time.