High purity SiC wafer boat carrier

VeTekSemi High purity SiC wafer boat carrier is an important bearing component used in annealing furnaces, diffusion furnaces and other equipment in the semiconductor manufacturing process. High purity SiC wafer boat carrier is usually made of high purity silicon carbide material and mainly includes the following parts:

• Boat support body: a structure similar to a bracket, specially used to carry silicon wafers or other semiconductor materials.

• Support structure: Its support structure design enables it to bear heavy loads at high temperatures and will not deform or damage during high temperature treatment.

silicon carbide material

Physical properties of Recrystallized Silicon Carbide：

If the production process requirements are higher, CVD SiC coating can be performed on the High purity SiC wafer boat carrier to make the purity reach more than 99.99995%, further improving its high temperature resistance.

Basic physical properties of CVD SiC coating:

During high temperature treatment, the High purity SiC wafer boat carrier enables the silicon wafer to be heated evenly to avoid local overheating. In addition, the high temperature resistance of silicon carbide material enables it to maintain structural stability at temperatures of 1200°C or even higher.

During the diffusion or annealing process, the cantilever paddle and the High purity SiC wafer boat carrier work together. The cantilever paddle slowly pushes the High purity SiC wafer boat carrier carrying the silicon wafer into the furnace chamber and stops it at a designated position for processing. 

The High purity SiC wafer boat carrier maintains contact with the silicon wafer and is fixed in a specific position during the heat treatment process, while the cantilever paddle helps keep the entire structure in the right position while ensuring temperature uniformity.

The High purity SiC wafer boat carrier and the cantilever paddle work together to ensure the accuracy and stability of the high temperature process.

VeTek Semiconductor provides you with customized High purity SiC wafer boat carrier according to your needs. Looking forward to your inquiry.

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