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Three-Piece Graphite Crucibles
  • Three-Piece Graphite CruciblesThree-Piece Graphite Crucibles
  • Three-Piece Graphite CruciblesThree-Piece Graphite Crucibles

Three-Piece Graphite Crucibles

For demanding semiconductor crystal growth applications, the VETEK three‑piece graphite crucible delivers the stability, purity, and thermal evenness that the process requires. Made from high‑grade isostatic graphite—with optional SiC, TaC, or PyC coatings—its split design isn’t just for convenience. It actively reduces thermal stress, makes maintenance faster, and keeps performing cycle after cycle.

Key Features
· High-purity isostatic graphite with ash content ≤5 ppm after purification.

· Three-piece modular design minimizes thermal stress and extends service life.

· Excellent thermal conductivity for stable temperature distribution.

· Outstanding thermal shock resistance under repeated heating and cooling.

· Compatible with optional CVD SiC, TaC, and PyC coatings.

· Precision CNC machining ensures tight dimensional tolerances.

· Custom sizes and structures available according to customer drawings.


Specifications

Physical properties of isostatic graphite
Property
Unit
Typical Value
Bulk Density
g/cm³
1.83
Hardness
HSD
58
Electrical Resistivity
μΩ.m
10
Flexural Strength
MPa
47
Compressive Strength
MPa
103
Tensile Strength
MPa
31
Young' s Modulus
GPa
11.8
Thermal Expansion(CTE)
10-6K-1
4.6
Thermal Conductivity
W·m-1·K-1
130
Average Grain Size
μm
8-10
Porosity
%
10
Ash Content
ppm
≤5 (after purified)

Applications
· PVT SiC crystal growth

· Semiconductor thermal field systems

· Crystal growth furnaces

· High-temperature vacuum furnaces

· Compound semiconductor crystal growth

· Semiconductor R&D equipment


Why Work with VETEK?

· Complete in-house production from graphite purification to coating.

· Advanced CNC machining and semiconductor-grade quality control.

· Optional SiC, TaC, and PyC coating technologies.

· Custom manufacturing based on drawings or equipment models.

· Stable global supply and reliable technical support.


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