TaC Coating Spare Part

VeTek Semiconductor TaC Coating Plate is a special material widely used in the semiconductor manufacturing process. Combined with its high hardness and wear resistance, high temperature resistance, corrosion resistance, low friction coefficient and good thermal conductivity, TaC Coating Plate plays an irreplaceable role in many links of semiconductor processing.

Generally, the applications of TaC coated plates in semiconductor processing are as follows:

●  CVD/ALD growth substrate: The high temperature resistance, chemical stability and low friction coefficient of TaC coated plates make them ideal CVD/ALD growth substrates. It can provide a stable growth environment to ensure the uniformity and density of the film.

●  Etching mask plate: The high hardness and corrosion resistance of TaC coated plates enable them to withstand high-energy processes such as plasma etching, as etching mask plates, protecting the underlying film.

●  CMP polishing pad: The wear resistance and low friction coefficient of TaC coated plates make them ideal materials for CMP polishing pads, which can effectively remove particles and defects on the surface of the film.

●  High temperature furnace tube: The high temperature resistance and corrosion resistance of TaC coated plates enable them to be used as furnace tubes in high temperature furnaces for high temperature annealing, diffusion and other processes.

CVD TAC COATING Technical Parameters：

VeTek Semiconductor TaC Coating spare part products shops：