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China Semiconductor Materials Manufacturer, Supplier, Factory

We emphasize enhancement and introduce new solutions into the market just about every year for Semiconductor Materials, PVT Graphite, Porous Graphite Guide Ring, High purity porous graphite, Porous graphite, We generally hold the philosophy of win-win, and build long-term cooperation partnership with clients from throughout the earth.We believe that our growth base on customer's achievements, credit history is our lifetime.
Semiconductor Materials, We've exported our solutions all over the world, especially the USA and European countries. Furthermore, all of our merchandise are manufactured with advanced equipment and strict QC procedures to ensure high quality.If you are interested in any of our products and solutions, please don't hesitate to contact us. We are going to try our best to meet your needs.

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Hot Products

  • CVD Tantalum Carbide(TaC) Coated Susceptor

    CVD Tantalum Carbide(TaC) Coated Susceptor

    The VETEK CVD TaC Coated Susceptor combines a high-purity isostatic graphite substrate with a dense CVD tantalum carbide (TaC) coating to deliver exceptional thermal stability, corrosion resistance, and low particle generation for demanding semiconductor epitaxy. Designed for SiC, GaN, and AlN epitaxial growth, it minimizes contamination, improves wafer temperature uniformity, and extends component service life in high-temperature MOCVD and CVD processes.
  • CVD SiC coating Heating Element

    CVD SiC coating Heating Element

    CVD SiC coating Heating Element plays a core role in heating materials in PVD furnace (Evaporation Deposition). VeTek Semiconductor is a leading CVD SiC coated Heating Element manufacturer in China. We have advanced CVD coating capabilities and can provide you with customized CVD SiC coating products. VeTek Semiconductor looks forward to becoming your partner in SiC coated Heating Element.
  • Solid Silicon Carbide Focusing Ring

    Solid Silicon Carbide Focusing Ring

    Veteksemicon Solid Silicon Carbide (SiC) Focusing Ring is a critical consumable component used in advanced semiconductor epitaxy and plasma etching processes, where precise control of plasma distribution, thermal uniformity, and wafer edge effects is essential. Manufactured from high-purity solid silicon carbide, this focusing ring exhibits exceptional plasma erosion resistance, high-temperature stability, and chemical inertness, enabling reliable performance under aggressive process conditions. We look forward to your inquiry.
  • SiC Block

    SiC Block

    Veteksemicon’s SiC Block is designed for high-efficiency grinding and thinning of silicon and sapphire wafers. With excellent thermal conductivity (≥120 W/m·K), high thermal shock resistance, and superior wear resistance (Mohs ≥9), our blocks improve process stability and reduce tool change frequency. Available in sizes from 120mm to 480mm, with customized options and fast delivery to meet diverse production needs.
  • Silicon Carbide Cantilever Paddle

    Silicon Carbide Cantilever Paddle

    VeTek Semiconductor's Silicon Carbide Cantilever Paddle is an important component in the semiconductor manufacturing process, especially suitable for diffusion furnaces or LPCVD furnaces in high-temperature processes such as diffusion and RTP. Our Silicon Carbide Cantilever Paddle is carefully designed and manufactured with excellent high-temperature resistance and mechanical strength, and can safely and reliably transport wafers to the process tube under harsh process conditions for various high-temperature processes such as diffusion and RTP. We look forward to becoming your long-term partner in China.Feel free to inquire us.
  • SiC Coated Graphite Barrel Susceptor for EPI

    SiC Coated Graphite Barrel Susceptor for EPI

    The barrel type epitaxial wafer heating base is a product with complicated processing technology, which is very challenging to machining equipment and ability. Vetek semiconductor has advanced equipment and rich experience in processing SiC coated graphite barrel susceptor for EPI, can provide the same as the original factory life, more cost-effective epitaxial barrels.If you are interested in our datas,pls no hesitate to contact us.

  • What is semiconductor epitaxy process?

    It is ideal to build integrated circuits or semiconductor devices on a perfect crystalline base layer. The epitaxy (epi) process in semiconductor manufacturing aims to deposit a fine single-crystalline layer, usually about 0.5 to 20 microns, on a single-crystalline substrate. The epitaxy process is an important step in the manufacture of semiconductor devices, especially in silicon wafer manufacturing.

  • SiC vs. TaC Coating: The Ultimate Shield for Graphite Susceptors in High-Temp Power Semi Processing

    In the world of wide-bandgap (WBG) semiconductors, if the advanced manufacturing process is the "soul," the graphite susceptor is the "backbone," and its surface coating is the critical "skin."

  • Veteksemicon shines at the 2025 Shanghai SEMICON International Exhibition

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  • Aixtron G10 Components: Key Parts for High-Performance SiC Epitaxy

    Take a look at key Aixtron G10 Components for high-temp SiC epitaxy systems. We cover CVD SiC coated graphite parts, TaC coating components, and thermal field structures – and how they help with process stability, purity control, and wafer yield in advanced semiconductor manufacturing.

  • ​Inside the Manufacturing of Solid CVD SiC Focus Rings: From Graphite to High-Precision Parts

    In the high-stakes world of semiconductor manufacturing, where precision and extreme environments coexist, Silicon Carbide (SiC) focus rings are indispensable. Known for their exceptional thermal resistance, chemical stability, and mechanical strength, these components are critical to advanced plasma etching processes. The secret behind their high performance lies in Solid CVD (Chemical Vapor Deposition) technology. Today, we take you behind the scenes to explore the rigorous manufacturing journey—from a raw graphite substrate to a high-precision "invisible hero" of the fab.

  • What is Silicon Carbide(SiC)Ceramic Wafer Boat?

    In semiconductor high-temperature processes, the handling, supporting, and thermal treatment of wafers rely on a special supporting component—the wafer boat. As process temperatures rise and cleanliness and particle control requirements increase, traditional quartz wafer boats gradually reveal issues such as short service life, high deformation rates, and poor corrosion resistance.

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