Wafer Carrier for VEECO MOCVD (LED Epitaxy)

Product Features：

1. High-purity graphite base with a dense CVD SiC layer
2. Good thermal uniformity for stable LED epitaxy
3. Stands up to NH₃, HCl, and other corrosive gases used in the process
4. Low particle shedding and long service life
5. Pocket designs can be customized for different wafer sizes and reactor platforms
6. Works well for long-term, high-temperature MOCVD operation

Applications:
These wafer carriers are widely used in LED and compound semiconductor epitaxy, including:

• GaN LED epitaxy
• Blue-green LED epitaxy
• Deep UV LED growth
• Si-based GaN epitaxy
• General compound semiconductor manufacturing

Custom carrier solutions fit multiple LED MOCVD platforms, such as:

• VEECO K465i
• VEECO K700
• VEECO K868
• Aixtron G4/G5
• A7/Unimax

Technical Advantages:

1. CVD SiC coating technology that gives you good density and purity
2. Coating thickness variation held within ±10 μm – helps thermal performance stay stable
3. CNC machining down to 3 μm precision for good wafer fit and rotation stability
4. Coating sticks well and resists cracking after repeated high-temperature MOCVD cycles
5. Handles NH₃, HCl, and other harsh epitaxy environments without trouble
6. Low particle generation and clean surface to support high-yield LED epitaxy
7. Can coat large or custom sizes for different reactor platforms and wafer layouts
8. Long experience with custom graphite and SiC-coated parts for LED and compound semiconductor epitaxy

FAQ:
1. What does a wafer carrier do in MOCVD LED epitaxy?

A: It holds and rotates wafers inside the MOCVD reactor, and helps keep the temperature steady during epitaxial growth.

2. Why use SiC-coated graphite wafer carriers for MOCVD?

A: The CVD SiC coating gives better corrosion resistance, thermal stability, and durability. It also helps cut down on particle contamination in high-temperature epitaxy.

3. Does Vetek Semiconductor make custom wafer carriers?
A: Yes. We can design custom carriers based on your reactor platform, wafer size, pocket layout, and other process needs.