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China CVD SiC equipment Manufacturer, Supplier, Factory

Just about every member from our large efficiency income crew values customers' wants and enterprise communication for CVD SiC equipment, SiC Coating Inlet Ring, Silicon carbide epitaxy, CVD SiC coating, silicon carbide substrate, The concept of our organization is "Sincerity, Speed, Provider, and Satisfaction". We are going to follow this concept and earn more and more customers' satisfaction.
CVD SiC equipment, In order to make more people know our goods and to enlarge our market, now we have devoted a lot of attention to technical innovations and improvement, as well as replacement of equipment. Last but not the least, we also pay more attention to training our managerial personnel, technicians and workers in planned way.

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Hot Products

  • Semiconductor Quartz Bath

    Semiconductor Quartz Bath

    VetekSemicon is a leading supplier of semiconductor-related accessories in China. The semiconductor quartz bath is a high-performance device designed for silicon wafer cleaning. Made of high-purity quartz, it has excellent high temperature resistance (0°C to 1200°C) and corrosion resistance. It can accommodate up to 50 wafers with a maximum diameter of 300mm and supports special size customization. Looking forward to your inquiry.
  • CVD SiC Focus Ring

    CVD SiC Focus Ring

    VeTek Semiconductor is a leading domestic manufacturer and supplier of CVD SiC focus rings, dedicated to providing high-performance, high-reliability product solutions for the semiconductor industry. VeTek Semiconductor's CVD SiC focus rings use advanced chemical vapor deposition (CVD) technology, have excellent high temperature resistance, corrosion resistance and thermal conductivity, and are widely used in semiconductor lithography processes. Your inquiries are always welcome.
  • CVD SiC coating graphite susceptor

    CVD SiC coating graphite susceptor

    VeTek Semiconductor CVD SiC coating graphite susceptor is one of the important components in the semiconductor industry such as epitaxial growth and wafer processing. It is used in MOCVD and other equipment to support the processing and handling of wafers and other high-precision materials. VeTek Semiconductor has China's leading SiC coated graphite susceptor and TaC Coated Graphite Susceptor production and manufacturing capabilities, and looks forward to your consultation.
  • High-purity Quartz Bath

    High-purity Quartz Bath

    In the critical steps of wafer cleaning, etching, and wet etching, high-purity quartz bath is more than just a container; it's the first line of defense for process success. Metal ion contamination, thermal shock cracking, chemical attack, and particle residue are hidden causes of yield fluctuations. Veteksemi is deeply rooted in semiconductor-grade quartz. Every quartz bath we manufacture is designed to provide uncompromising reliability and cleanliness for your cutting-edge processes.
  • 8 Inch Halfmoon Part for LPE Reactor

    8 Inch Halfmoon Part for LPE Reactor

    VeTek Semiconductor is a leading semiconductor equipment manufacturer in China, focusing on the R&D and production of 8 Inch Halfmoon Part for LPE Reactor. We have accumulated rich experience over the years, especially in SiC coating materials, and are committed to providing efficient solutions tailored for LPE epitaxial reactors. Our 8 Inch Halfmoon Part for LPE Reactor has excellent performance and compatibility, and is an indispensable key component in epitaxial manufacturing. Welcome your inquiry to learn more about our products.
  • SiC coated Satellite cover for MOCVD

    SiC coated Satellite cover for MOCVD

    SiC coated satellite cover for MOCVD plays an irreplaceable role in ensuring high-quality epitaxial growth on wafers due to its extremely high temperature resistance, excellent corrosion resistance and outstanding oxidation resistance.

  • What measurement equipment are there in the Fab factory? - VeTek semiconductor

    There are many types of measurement equipment in the Fab factory. Common equipment includes lithography process measurement equipment, etching process measurement equipment, thin film deposition process measurement equipment, doping process measurement equipment, CMP process measurement equipment, wafer particle detection equipment and other measurement equipment.

  • Veteksemicon shines at the 2025 Shanghai SEMICON International Exhibition

    Veteksemicon shines at 2025 Shanghai SEMICON International Exhibition, leading the future of semiconductor industry with innovative technologies

  • What is a PECVD graphite boat ?

    The core material of PECVD graphite boat is high-purity isotropic graphite material (purity is usually ≥99.999%), which has excellent electrical conductivity, thermal conductivity and density. Compared with ordinary graphite boats, PECVD graphite boats have many physical and chemical property advantages and are mainly used in the semiconductor and photovoltaic industries, especially in PECVD and CVD processes.

  • What is the Core Material for SiC Growth ?

    In the preparation of high-quality and high-yield silicon carbide substrates, the core requires precise control of production temperature by good thermal field materials. Currently, the thermal field crucible kits mainly used are high-purity graphite structural components, whose functions are to heat molten carbon powder and silicon powder as well as to maintain heat.

  • SiC-Coated Graphite Susceptor: How It Affects Epitaxy Uniformity and Wafer Quality？

    A SiC-coated graphite susceptor is a critical thermal-field component in semiconductor epitaxy rather than simply a wafer holder. This technical article explains how susceptor geometry, flatness, pocket design, graphite properties and CVD SiC coating quality work together to influence wafer thermal boundaries, temperature distribution and epitaxial uniformity. It also examines common susceptor failure modes, coating degradation, particle risks and the key engineering parameters required when specifying a custom or replacement epitaxy susceptor.

  • PZT Piezoelectric Wafers: High-Performance Solutions for Next-Gen MEMS

    In the era of rapid MEMS (Micro-Electromechanical Systems) evolution, selecting the right piezoelectric material is a make-or-break decision for device performance. PZT (Lead Zirconate Titanate) thin-film wafers have emerged as the premier choice over alternatives like AlN (Aluminum Nitride), offering superior electromechanical coupling for cutting-edge sensors and actuators.

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