Silicon Carbide Coating

VeTek Semiconductor specializes in the production of ultra pure Silicon Carbide Coating products, these coatings are designed to be applied to purified graphite, ceramics, and refractory metal components.

Our high purity coatings are primarily targeted for use in the semiconductor and electronics industries. They serve as a protective layer for wafer carriers, susceptors, and heating elements, safeguarding them from corrosive and reactive environments encountered in processes such as MOCVD and EPI. These processes are integral to wafer processing and device manufacturing. Additionally, our coatings are well-suited for applications in vacuum furnaces and sample heating, where high vacuum, reactive, and oxygen environments are encountered.

At VeTek Semiconductor, we offer a comprehensive solution with our advanced machine shop capabilities. This enables us to manufacture the base components using graphite, ceramics, or refractory metals and apply the SiC or TaC ceramic coatings in-house. We also provide coating services for customer-supplied parts, ensuring flexibility to meet diverse needs.

Our Silicon Carbide Coating products are widely used in Si epitaxy, SiC epitaxy, MOCVD system, RTP/RTA process, etching process, ICP/PSS etching process, process of various LED types, including blue and green LED, UV LED and deep-UV LED etc.,which is adapted to equipment from LPE, Aixtron, Veeco, Nuflare, TEL, ASM, Annealsys, TSI and so on.

Reactor parts we can do:

Silicon Carbide Coating several unique advantages:

Silicon Carbide Coating several unique advantages

VeTek Semiconductor Silicon Carbide Coating Parameter

Basic physical properties of CVD SiC coating
Property	Typical Value
Crystal Structure	FCC β phase polycrystalline, mainly (111) oriented
SiC coating Density	3.21 g/cm³
SiC coatingHardness	2500 Vickers hardness（500g load）
Grain SiZe	2~10μm
Chemical Purity	99.99995%
Heat Capacity	640 J·kg^-1·K^-1
Sublimation Temperature	2700℃
Flexural Strength	415 MPa RT 4-point
Young' s Modulus	430 Gpa 4pt bend, 1300℃
Thermal Conductivity	300W·m^-1·K^-1
Thermal Expansion(CTE)	4.5×10-6K^-1

CVD SIC FILM CRYSTAL STRUCTURE

Silicon Carbide coated Epi susceptor SiC Coating Wafer Carrier SiC coated Satellite cover for MOCVD CVD SiC Coating Wafer Epi Susceptor CVD SiC coating Heating Element Aixtron Satellite wafer carrier SiC Coating Epi susceptor SiC coating halfmoon graphite parts

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MOCVD epitaxial wafer susceptor

VeTek Semiconductor has been engaged in the semiconductor epitaxial growth industry for a long time and has rich experience and process skills in MOCVD epitaxial wafer susceptor products. Today, VeTek Semiconductor has become China's leading MOCVD epitaxial wafer susceptor manufacturer and supplier, and the wafer susceptors it provides have played an important role in the manufacturing of GaN epitaxial wafers and other products.

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Vertical furnace SiC coated ring

Vertical furnace SiC coated ring is a component specially designed for Vertical furnace. VeTek Semiconductor can do the best for you in terms of both materials and manufacturing processes. As a leading manufacturer and supplier of Vertical furnace SiC coated ring in China, VeTek Semiconductor is confident that we can provide you with the best products and services.

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GaN epitaxial susceptor

As a leading GaN epitaxial susceptor supplier and manufacturer in China, VeTek semiconductor GaN epitaxial susceptor is a high-precision susceptor designed for GaN epitaxial growth process, used to support epitaxial equipment such as CVD and MOCVD. In the manufacturing of GaN devices (such as power electronic devices, RF devices, LEDs, etc.), GaN epitaxial susceptor carries the substrate and achieves high-quality deposition of GaN thin films under high temperature environment. Welcome your further inquiry.

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SiC coated wafer carrier

As a leading SiC coated wafer carrier supplier and manufacturer in China, VeTek Semiconductor's SiC coated wafer carrier is made of high-quality graphite and CVD SiC coating, which has super stability and can work for a long time in most epitaxial reactors. VeTek Semiconductor has industry-leading processing capabilities and can meet customers' various customized requirements for SiC coated wafer carriers. VeTek Semiconductor looks forward to establishing a long-term cooperative relationship with you and growing together.

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SiC Coating graphite MOCVD heater

VeTeK Semiconductor produces SiC Coating graphite MOCVD heater, which is a key component of the MOCVD process. Based on a high-purity graphite substrate, the surface is coated with a high-purity SiC coating to provide excellent high-temperature stability and corrosion resistance. With high quality and highly customized product services, VeTeK Semiconductor's SiC Coating graphite MOCVD heater is an ideal choice to ensure MOCVD process stability and thin film deposition quality. VeTeK Semiconductor looks forward to becoming your partner.

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Silicon Carbide Coated Epi Susceptor

VeTek Semiconductor is a leading manufacturer and supplier of SiC coating products in China. VeTek Semiconductor's silicon carbide coated Epi susceptor has the industry's top quality level, is suitable for multiple styles of epitaxial growth furnaces, and provides highly customized product services. VeTek Semiconductor looks forward to becoming your long-term partner in China.

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As a professional Silicon Carbide Coating manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Silicon Carbide Coating made in China, you can leave us a message.

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+86-18069220752
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+86-579-87223657
E-mail
anny@veteksemi.com
Address
Wangda Road, Ziyang Street, Wuyi County, Jinhua City, Zhejiang Province, China

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Silicon Carbide Coating

Reactor parts we can do:

Silicon Carbide Coating several unique advantages:

VeTek Semiconductor Silicon Carbide Coating Parameter

CVD SIC FILM CRYSTAL STRUCTURE

MOCVD epitaxial wafer susceptor

Vertical furnace SiC coated ring

GaN epitaxial susceptor

SiC coated wafer carrier

SiC Coating graphite MOCVD heater

Silicon Carbide Coated Epi Susceptor

Send Inquiry

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About Us

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Contact Us

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Fax

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