Silicon Carbide Coating

An important component used in the wafer fabrication etching process is the plasma etching focus ring, whose function is to hold the wafer in place to maintain plasma density and prevent contamination of the wafer sides.Vetek semiconductor provide plasma etching focus ring with different material like monocrystalline silicon, silicon carbide, boron carbide and other ceramic materials.

Vetek Semiconductor is a leading manufacturer and supplier of SiC coated E-Chucks in China. SiC coated E-Chuck is specially designed for GaN wafer etching process, with excellent performance and long service life, to provide all-round support for your semiconductor manufacturing. Our strong processing ability enables us to provide you with the SiC Ceramic Susceptor you want. Looking forward to your inquire.

Veteksemicon provides high-performance SiC ICP Etching Plates, designed for ICP etching applications in the semiconductor industry. Its unique material properties enable it to perform well in high temperature, high pressure and chemical corrosion environments, ensuring excellent performance and long-term stability in various etching processes.

VeTek Semiconductor Graphite Heating Unit is a high-performance industrial heating solution made of high-purity graphite material, which can provide precise and efficient heating effect. Graphite Heating Unit is widely used in semiconductor, electronics, ceramics and other fields. Welcome your further inquiry.

SiC coated deep UV LED susceptor is designed for MOCVD process to support efficient and stable deep UV LED epitaxial layer growth. VeTek Semiconductor is a leading manufacturer and supplier of SiC coated deep UV LED susceptor in China. We have rich experience and have established long-term cooperative relationships with many LED epitaxial manufacturers.We are the top domestic manufacturer of susceptor products for LEDs. After years of verification, our product life span is on par with that of top international manufacturers. Looking forward to your inquiry.

VeTek Semiconductor's LED Epitaxy susceptor is designed for blue and green LED epitaxial manufacturing. It combines silicon carbide coating and SGL graphite, and has high hardness, low roughness, good thermal stability and excellent chemical stability. LED Epitaxy susceptor is one of VeTek Semiconductor's most outstanding products. We look forward to your inquiry.