Silicon Carbide Carrier Plate For LED Etching

General product information

Product business terms

Application: Veteksemicon Silicon Carbide Carrier Plate For LED Etching is specifically designed for LED etching processes. With its excellent corrosion resistance and stability, it helps customers significantly improve yield and reduce overall costs.

Services that can be provided: customer application scenario analysis, matching materials, technical problem solving.

Company profile: Veteksemicon has 2 laboratories, a team of experts with 20 years of material experience, with R&D and production, testing and verification capabilities.

Veteksemicon Silicon Carbide Carrier Plate For LED Etching core advantages

1. Excellent chemical resistance

During wet or dry etching of LED chips, carriers are constantly exposed to highly corrosive chemicals such as hydrofluoric acid, nitric acid, and phosphoric acid. Traditional quartz materials gradually erode, resulting in surface roughness and particle contamination. Veteksemicon silicon carbide carriers, with their inherent chemical inertness, effectively resist attack from various acids and bases, ensuring they maintain surface integrity and a smooth finish even after hundreds of cycles of rigorous processing. This significantly extends their service life and maintains the cleanliness of the process chamber.

2. Excellent high temperature stability and dimensional accuracy

Semiconductor processing involves frequent thermal cycling, making the material's coefficient of thermal expansion (CTE) crucial. Our silicon carbide susceptors have an extremely low CTE, perfectly matching the silicon wafer. They effectively resist thermal stress, preventing warping or deformation while maintaining exceptional dimensional stability at sustained operating temperatures of hundreds of degrees Celsius. This ensures uniform contact between the wafer and the susceptor, ensuring excellent etching process uniformity and high batch-to-batch consistency.

3. High purity and ultra-low pollution

LED epitaxial wafers are extremely sensitive to metal impurities. Even the slightest contamination can lead to reduced chip luminous efficiency and yield loss. Veteksemicon utilizes ultra-high-purity raw materials, advanced sintering processes, and rigorously controls the production environment to minimize metal ion impurities in its products. This uncompromising pursuit of purity from the source provides the most reliable protection for your sensitive optoelectronic devices, directly contributing to improved product yield and performance.

4. Excellent mechanical properties and long life

Silicon carbide possesses exceptional hardness and wear resistance. Compared to graphite components, it is less susceptible to dust and particle loss, and compared to quartz components, it can withstand greater mechanical stress and accidental bumps during operation. These robust physical properties enable Veteksemicon carriers to withstand frequent daily handling, cleaning, and transport, significantly reducing unplanned downtime and spare part costs due to breakage, resulting in a longer service life and lower overall cost of ownership for customers.

5. Ecological chain verification endorsement

Veteksemicon Silicon Carbide Carrier Plate For LED Etching' ecological chain verification covers raw materials to production, has passed international standard certification, and has a number of patented technologies to ensure its reliability and sustainability in the semiconductor and new energy fields.

Typical application scenarios

     ● Etching process of GaN-based LED epitaxial wafers grown by MOCVD

     ● Dry etching (ICP, RIE) carrier plate in LED chip manufacturing

     ● Wet chemical etching carrier plate in LED chip manufacturing

     ● Other occasions where semiconductor materials need to be processed in highly corrosive and high-temperature environments

For detailed technical specifications, white papers, or sample testing arrangements, please contact our Technical Support Team to explore how Veteksemicon can enhance your process efficiency.

Veteksemicon products shop