Silicon Carbide Coating

VeTek Semiconductor specializes in the production of ultra pure Silicon Carbide Coating products, these coatings are designed to be applied to purified graphite, ceramics, and refractory metal components.

Our high purity coatings are primarily targeted for use in the semiconductor and electronics industries. They serve as a protective layer for wafer carriers, susceptors, and heating elements, safeguarding them from corrosive and reactive environments encountered in processes such as MOCVD and EPI. These processes are integral to wafer processing and device manufacturing. Additionally, our coatings are well-suited for applications in vacuum furnaces and sample heating, where high vacuum, reactive, and oxygen environments are encountered.

At VeTek Semiconductor, we offer a comprehensive solution with our advanced machine shop capabilities. This enables us to manufacture the base components using graphite, ceramics, or refractory metals and apply the SiC or TaC ceramic coatings in-house. We also provide coating services for customer-supplied parts, ensuring flexibility to meet diverse needs.

Our Silicon Carbide Coating products are widely used in Si epitaxy, SiC epitaxy, MOCVD system, RTP/RTA process, etching process, ICP/PSS etching process, process of various LED types, including blue and green LED, UV LED and deep-UV LED etc.,which is adapted to equipment from LPE, Aixtron, Veeco, Nuflare, TEL, ASM, Annealsys, TSI and so on.

Reactor parts we can do:

Silicon Carbide Coating several unique advantages:

Silicon Carbide Coating several unique advantages

VeTek Semiconductor Silicon Carbide Coating Parameter

Basic physical properties of CVD SiC coating
Property	Typical Value
Crystal Structure	FCC β phase polycrystalline, mainly (111) oriented
SiC coating Density	3.21 g/cm³
SiC coatingHardness	2500 Vickers hardness（500g load）
Grain SiZe	2~10μm
Chemical Purity	99.99995%
Heat Capacity	640 J·kg^-1·K^-1
Sublimation Temperature	2700℃
Flexural Strength	415 MPa RT 4-point
Young' s Modulus	430 Gpa 4pt bend, 1300℃
Thermal Conductivity	300W·m^-1·K^-1
Thermal Expansion(CTE)	4.5×10-6K^-1

CVD SIC FILM CRYSTAL STRUCTURE

Silicon Carbide coated Epi susceptor SiC Coating Wafer Carrier SiC coated Satellite cover for MOCVD CVD SiC Coating Wafer Epi Susceptor CVD SiC coating Heating Element Aixtron Satellite wafer carrier SiC Coating Epi susceptor SiC coating halfmoon graphite parts

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Single wafer epi graphite susceptor

Veteksemicon Single wafer epi graphite susceptor is designed for high-performance silicon carbide (SiC), gallium nitride (GaN) and other third generation semiconductor epitaxial process, and is the core bearing component of high-precision epitaxial sheet in mass production.Welcome your further inquiry.

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Plasma Etching Focus Ring

An important component used in the wafer fabrication etching process is the plasma etching focus ring, whose function is to hold the wafer in place to maintain plasma density and prevent contamination of the wafer sides.Vetek semiconductor provide plasma etching focus ring with different material like monocrystalline silicon, silicon carbide, boron carbide and other ceramic materials.

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SiC coated E-Chuck

Vetek Semiconductor is a leading manufacturer and supplier of SiC coated E-Chucks in China. SiC coated E-Chuck is specially designed for GaN wafer etching process, with excellent performance and long service life, to provide all-round support for your semiconductor manufacturing. Our strong processing ability enables us to provide you with the SiC Ceramic Susceptor you want. Looking forward to your inquire.

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SiC ICP Etching Plate

Veteksemicon provides high-performance SiC ICP Etching Plates, designed for ICP etching applications in the semiconductor industry. Its unique material properties enable it to perform well in high temperature, high pressure and chemical corrosion environments, ensuring excellent performance and long-term stability in various etching processes.

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Graphite Heating Unit

VeTek Semiconductor Graphite Heating Unit is a high-performance industrial heating solution made of high-purity graphite material, which can provide precise and efficient heating effect. Graphite Heating Unit is widely used in semiconductor, electronics, ceramics and other fields. Welcome your further inquiry.

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SiC coated deep UV LED susceptor

SiC coated deep UV LED susceptor is designed for MOCVD process to support efficient and stable deep UV LED epitaxial layer growth. VeTek Semiconductor is a leading manufacturer and supplier of SiC coated deep UV LED susceptor in China. We have rich experience and have established long-term cooperative relationships with many LED epitaxial manufacturers.We are the top domestic manufacturer of susceptor products for LEDs. After years of verification, our product life span is on par with that of top international manufacturers. Looking forward to your inquiry.

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As a professional Silicon Carbide Coating manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Silicon Carbide Coating made in China, you can leave us a message.

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+86-18069220752
Fax
+86-579-87223657
E-mail
anny@veteksemi.com
Address
Wangda Road, Ziyang Street, Wuyi County, Jinhua City, Zhejiang Province, China

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Silicon Carbide Coating

Reactor parts we can do:

Silicon Carbide Coating several unique advantages:

VeTek Semiconductor Silicon Carbide Coating Parameter

CVD SIC FILM CRYSTAL STRUCTURE

Single wafer epi graphite susceptor

Plasma Etching Focus Ring

SiC coated E-Chuck

SiC ICP Etching Plate

Graphite Heating Unit

SiC coated deep UV LED susceptor

Send Inquiry

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About Us

Products

Contact Us

Phone

Fax

E-mail

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