China CVD SiC coating Dummy wafer Manufacturer, Supplier, Factory

If you’ve ever dealt with uneven gas flow or particle contamination in a deposition chamber, the VETEK CVD SiC Coated Graphite Shower Head is designed to solve that. It starts with high‑purity isostatic graphite for thermal stability and easy machining, then gets a dense CVD Silicon Carbide (SiC) coating that seals the surface, resists corrosive gases (like HCl or NF₃), and prevents outgassing. The result is a gas distribution plate that delivers uniform flow across the wafer, handles high‑temperature epitaxy, and lasts far longer than bare graphite or quartz – making it a trusted component for CVD, PECVD, MOCVD, silicon epitaxy, and SiC epitaxy processes. We also offer custom hole patterns and sizes, because no two reactors are exactly the same.

The high-temperature and chemically reactive environments of MOCVD, the protection of the reaction chamber and the precision of process control are paramount. VETEK provides premium Opaque (Milky White) Quartz components, specifically designed to act as the "cleanroom" and "precision gate" within your semiconductor equipment. These components offer a cost-effective yet high-performance solution for managing thermal radiation and preventing contamination.

Silicon Carbide Shower Head has excellent high temperature tolerance, chemical stability, thermal conductivity and good gas distribution performance, which can achieve uniform gas distribution and improve film quality. Therefore, it is usually used in high temperature processes such as chemical vapor deposition (CVD) or physical vapor deposition (PVD) processes. Welcome your further consultation to us ,vetek semiconductor.

VeTek Semiconductor is a leading Tantalum Carbide Coated Chuck manufacturer and innovator in China.We have been specialized in TaC coating for many years.Our products have a high purity and high temperature resistance up to 2000℃.We look forward to becoming your long-term partner in China.Welcome to consult at any time.

VeTek Semiconductor High Purity Silicon Carbide (SiC) Powder is specially developed for SiC crystal growth, semiconductor materials, and advanced ceramic applications. Through advanced purification technology and strict quality control, our SiC powder offers ultra-low impurity levels, stable particle distribution, and excellent consistency for demanding manufacturing processes.

Solid SiC Gas Shower Head plays a major role in making the gas uniform in the CVD process, thereby ensuring uniform heating of the substrate. VeTek Semiconductor has been deeply involved in the field of solid SiC devices for many years and is able to provide customers with customized Solid SiC Gas Shower Heads. No matter what your requirements are, we look forward to your inquiry.