Aixtron G10 Solid SiC planetary reactor components

1. Key Features & Advantages

• Fully dense, binder-free Solid SiC structure for superior wear and corrosion resistance

• Excellent thermal conductivity and thermal shock resistance at temperatures above 1500 °C

• Ultra-low particle generation and high purity, minimizing contamination risk

• Outstanding chemical inertness against process gases used in SiC epitaxy

• Long service life under repeated high-temperature cycling

• Precision-machined to tight dimensional tolerances for reliable fit and process stability

 2. Typical Applications

These Solid SiC accessories are used in key functional areas of the Aixtron G10 reactor, including:

• Cover plates and selected cover elements

• Protective rings and high-wear components

• Precision pins, washers, and small structural parts

• Other custom high-purity inserts exposed to intense gas flow or thermal load

They support stable temperature distribution, uniform gas delivery, and low defect density during high-volume SiC epitaxial growth for power MOSFETs, diodes, and related wide-bandgap devices.

3. Why Choose VeTek Solid SiC for Aixtron G10?

As a specialized manufacturer of semiconductor-grade materials, VeTek Semiconductor provides:

• High-purity Solid SiC components tailored for Aixtron G10 systems, for example: Cover ring，Inner/outer covers，pulling down/support plate，Satellite disc，susceptor

• Strict purity control and precision CNC machining

• Complementary solutions including CVD SiC-coated graphite and TaC-coated parts for complete thermal-field coverage

• Custom designs matched to specific process conditions and reactor configurations

Our Solid SiC accessories help customers maximize the productivity advantages of the Aixtron G10 platform—high wafer output, excellent thickness and doping uniformity, and competitive cost of ownership—while extending component lifetime and reducing particle-related yield loss.