Solid SiC Gas Shower Head

Solid SiC Gas Shower Head

VeTek Semiconductor is an integrated company dedicated to research, production, and sales. VeTek Semiconductor has been working on semiconductor epitaxy, etching and other process-related products for many years, especially CVD SiC coating, CVD TaC coating, and CVD Solid SiC are our flagship products.

VeTek Semiconductor Solid SiC Gas Shower Head are commonly used to evenly distribute precursor gases onto the substrate surface during semiconductor CVD processes. Using CVD-SiC material for shower heads offers several advantages. Its high thermal conductivity helps dissipate heat generated in the CVD process, ensuring uniform temperature distribution on the substrate. Additionally, CVD sic shower head's chemical stability enables it to withstand corrosive gases and harsh environments commonly encountered in CVD processes. 

The design of CVD SiC shower heads can be tailored to specific CVD systems and process requirements. However, they typically consist of a plate or disk-shaped component with a series of precision-drilled holes or slots. The hole pattern and geometry are carefully designed to ensure uniform gas distribution and flow velocity over the substrate surface.

Physical Properties of Solid SiC