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  • Solid SiC Gas Shower Head

    Solid SiC Gas Shower Head

    Solid SiC Gas Shower Head plays a major role in making the gas uniform in the CVD process, thereby ensuring uniform heating of the substrate. VeTek Semiconductor has been deeply involved in the field of solid SiC devices for many years and is able to provide customers with customized Solid SiC Gas Shower Heads. No matter what your requirements are, we look forward to your inquiry.
  • MOCVD Susceptor

    MOCVD Susceptor

    MOCVD Susceptor is characteristed with planetary disc and profesional for its stable performance in epitaxy. Vetek semiconductor has rich experience in machining and CVD SiC coating of this product, welcome to communicate with us about real cases.
  • CVD SiC Coated Graphite Susceptor for Wafer Carrier

    CVD SiC Coated Graphite Susceptor for Wafer Carrier

    VETEK CVD SiC Coated Graphite Susceptor for Wafer Carrier is a high-performance wafer support component designed for semiconductor epitaxy processes. The product uses high-purity graphite as the substrate and is coated with a uniform CVD silicon carbide (SiC) layer, providing excellent thermal stability, chemical resistance, and particle control. As a critical graphite susceptor component, it directly supports wafers inside the reaction chamber and helps maintain uniform temperature distribution and stable epitaxial growth conditions.
  • TaC Coating Susceptor

    TaC Coating Susceptor

    VeTek Semiconductor presents the TaC Coating Susceptor, With its exceptional TaC coating, this susceptor offers a multitude of advantages that set it apart from conventional solutions.Integrating seamlessly into existing systems, the TaC Coating Susceptor from VeTek Semiconductor guarantees compatibility and efficient operation. Its reliable performance and high-quality TaC coating consistently deliver exceptional results in SiC epitaxy processes.We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.
  • VEECO MOCVD Heater

    VEECO MOCVD Heater

    VeTek Semiconductor is a leading manufacturer and supplier of VEECO MOCVD heater products in China. MOCVD heater has excellent chemical purity, thermal stability and corrosion resistance. It is an indispensable product in the metal organic chemical vapor deposition (MOCVD) process. Welcome to your further inquiries.
  • Solid SiC Etching Focusing Ring

    Solid SiC Etching Focusing Ring

    Solid SiC Etching Focusing Ring is one of the core components of wafer etching process, which plays a role in fixing wafer, focusing plasma and improving wafer etching uniformity. As the leading SiC Focusing Ring manufacturer in China, VeTek Semiconductor has advanced technology and mature process, and manufactures Solid SiC Etching Focusing Ring that fully meets the needs of end customers according to customer requirements. We look forward to your inquiry and becoming each other's long-term partners.
  • Related Blog
  • Reviews

  • Why does 3C-SiC stand out among many SiC polymorphs? - VeTek Semiconductor

    Silicon carbide (SiC) is a high-precision semiconductor material known for its excellent properties like high temperature resistance, corrosion resistance, and high mechanical strength. It has over 200 crystal structures, with 3C-SiC being the only cubic type, offering superior natural sphericity and densification compared to other types. 3C-SiC stands out for its high electron mobility, making it ideal for MOSFETs in power electronics. Additionally, it shows great potential in nanoelectronics, blue LEDs, and sensors.

  • How to Solve High Pocket-to-Pocket Variation in Multi-Pocket Silicon Epitaxy Graphite Susceptors?

    Addressing 1.4% pocket-to-pocket thickness variation in multi-pocket silicon epitaxy graphite susceptors, VeTek Semi improved susceptor flatness to <0.08mm and reduced variation to 0.69% via CVD flow field simulation and ultra-precision SiC coating, boosting wafer yield.

  • What is hot pressed SiC ceramics?

    Hot pressing sintering is the main method for preparing high-performance SiC ceramics. The process of hot pressing sintering includes: selecting high-purity SiC powder, pressing and molding under high temperature and high pressure, and then sintering. SiC ceramics prepared by this method have the advantages of high purity and high density, and are widely used in grinding discs and heat treatment equipment for wafer processing.

  • MOCVD SiC Coated Graphite Susceptor Cracking Analysis & Thermal Stress Optimization Case Study

    Learn how Vetek eliminated radial cracking in large-size MOCVD SiC-coated graphite susceptors. Structural stress buffer redesign & CTE matching increased service life by 300%+.

  • What is High-purity porous graphite?

    What is High-purity porous graphite ? - Vetek , This blog mainly introduces the specific working principle of High-purity porous graphite for SiC single crystal growth by PVT method.

  • Application of TaC-Coated Graphite Parts in Single Crystal Furnaces

    In the growth of SiC and AlN single crystals using the physical vapor transport (PVT) method, crucial components such as the crucible, seed holder, and guide ring play a vital role. As depicted in Figure 2 [1], during the PVT process, the seed crystal is positioned in the lower temperature region, while the SiC raw material is exposed to higher temperatures (above 2400 ℃).

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