China LED Epitaxy susceptor Manufacturer, Supplier, Factory

In semiconductor high-temperature processes, the handling, supporting, and thermal treatment of wafers rely on a special supporting component—the wafer boat. As process temperatures rise and cleanliness and particle control requirements increase, traditional quartz wafer boats gradually reveal issues such as short service life, high deformation rates, and poor corrosion resistance.

Vacuum coating includes film material vaporization, vacuum transportation and thin film growth. According to the different film material vaporization methods and transportation processes, vacuum coating can be divided into two categories: PVD and CVD.

The Dechuck principle of the Electrostatic Chuck is a key part of its workflow that involves electrostatic force elimination and wafer release mechanisms.

A SiC coated graphite susceptor for ASM is not just a replacement part inside an epitaxy system. It is a process-critical carrier that influences thermal uniformity, wafer cleanliness, coating durability, chamber stability, and long-term production cost.

This article mainly discusses the respective process advantages and differences of Molecular Beam Epitaxy process and Metal-organic chemical vapour deposition technologies.

With the development of the solar photovoltaic industry, diffusion furnaces and LPCVD furnaces are the main equipment for the production of solar cells, which directly affect the efficient performance of solar cells. Based on the comprehensive product performance and usage cost, silicon carbide ceramic materials have more advantages in the field of solar cells than quartz materials. The application of silicon carbide ceramic materials in the photovoltaic industry can greatly help photovoltaic enterprises reduce auxiliary material investment costs, improve product quality and competitiveness. The future trend of silicon carbide ceramic materials in the photovoltaic field is mainly towards higher purity, stronger load-bearing capacity, higher loading capacity, and lower cost.