High purity quartz boat

High purity quartz boats are precision carriers made of ultra-high purity quartz materials (SiO₂ content ≥ 99.99%), designed for high-temperature, high-cleanliness processes. This device is essential for processes such as annealing, diffusion, oxidation, and chemical vapor deposition (CVD), and is widely used in semiconductors, photovoltaics, and other fields. Its core advantage lies in the physical and chemical stability of the material itself.

Ⅰ. Excellent physical properties of Veteksemicon high-purity quartz boat

Ⅱ. Main uses and corresponding product advantages of High purity quartz boat

1. Semiconductor manufacturing:

Specific uses: Carrier tools in wafer high-temperature diffusion, oxidation, annealing, and CVD (chemical vapor deposition) processes.

Product advantages:

● Ultra-low pollution: Veteksemicon's 99.99% pure wafer boats avoid metal ion contamination and ensure chip electrical performance.

● Precise size: The flatness of the quartz wafer boat is ±0.05 mm, ensuring uniform heating of the wafer (such as a 12-inch wafer boat).

● Long life: According to the actual production data we have recorded, the quartz wafer boats we produce can be used continuously for more than 1000 hours at 1200°C, greatly reducing the replacement frequency (compared to ordinary quartz boats, the life is increased by 3 times).

2. Photovoltaic industry

Specific uses: In the field of photovoltaic industry manufacturing, high-purity quartz boats are usually used for silicon wafers in the phosphorus diffusion of PERC cells and the boron diffusion process of TOPCon cells.

Performance advantages:

● High load design: The single boat we produce can carry 200~300 silicon wafers (thickness 160~180μm), greatly improving the wafer production capacity per unit time.

● Rapid temperature rise and fall: Ultra-low thermal expansion coefficient (0.55×10⁻⁶/°C (20~1000°C), close to zero expansion) supports a 10%~15% reduction in process cycle.

● Anti-PID effect: No sodium ion precipitation during the silicon wafer loading process reduces the risk of photo-induced degradation.

Ⅲ. Quartz boat packaging specifications

Veteksemicon quartz boats will use multi-layer dense packaging to ensure the integrity of the product during storage and transportation.

At the same time, Veteksemincon supports customized extended process design, such as non-standard size (error ±0.1 mm), multi-layer stacking design (up to 5 layers), and high temperature resistant film coating (such as SiC coating). Welcome your further consultation.