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China Graphite epitaxial substrate Manufacturer, Supplier, Factory

We are proud of the superior customer gratification and wide acceptance due to our persistent pursuit of top of the range both of those on merchandise and service for Graphite epitaxial substrate, Ceramic E-chuck, Ceramic Electrostatic Chuck, Alumina Ceramic Vacuum Chuck, Silicon Carbide Wafer Chuck, We're very proud of your fantastic popularity from our prospects for our products' reputable quality.
Graphite epitaxial substrate, Why we can do these? Because: A, We are honest and reliable. Our products have high quality, attractive price, sufficient supply capacity and perfect service. B, Our geographical position has a big advantage . C, Various types: Welcome your inquiry, It will be highly appreciated.

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  • AMAT 0200-03201 CVD SiC Wafer Lift Pin

    AMAT 0200-03201 CVD SiC Wafer Lift Pin

    This AMAT 0200-03201 Wafer Lift Pin from VeTek starts with high-purity graphite, then we add a dense CVD SiC coating on top. It’s made for 300mm epitaxy systems and Applied Materials EPI reactors. Why graphite and SiC? Graphite handles heat really well. The SiC layer takes on corrosive gases and doesn’t wear out fast. The thin wall design? That’s for cleaner wafer lifting and positioning, fewer particles, and longer part life under high temperatures. We also make similar SiC coated graphite parts for ASM, Aixtron, and LPE systems. Looking forward to your inquiry.
  • Electric Fused Quartz

    Electric Fused Quartz

    Electric fused quartz is made of high-purity SiCl4 and melted by hydrogen-oxygen flame. The product is bubble-free. VeTek Semiconductor has mature electric fused quartz production capabilities and strong production capacity, and can provide corresponding electric fused quartz products according to customer needs. VeTek Semiconductor looks forward to your inquiry.
  • Pre-Heat Ring

    Pre-Heat Ring

    Pre-heat ring is used in the semiconductor epitaxy process to preheat wafers and make the temperature of wafers more stable and uniform, which is of great significance for the high-quality growth of epitaxy layers. Vetek Semiconductor strictly controls the purity of this product to prevent volatilization of impurities at high temperatures.Welcome to have a further discussion with us.
  • Silicon-based GaN Epitaxial Susceptor

    Silicon-based GaN Epitaxial Susceptor

    The silicon-based GaN epitaxial Susceptor is the core component required for GaN epitaxial production. Veteksemicon silicon-based GaN epitaxial Susceptor is specially designed for silicon-based GaN epitaxial reactor system, with advantages such as high purity, excellent high temperature resistance and corrosion resistance. Welcome your further consultation.
  • SiC Coating Set Disc

    SiC Coating Set Disc

    VeTek Semiconductor is top manufacturer of CVD SiC coatings in China, offers SiC Coating Set Disc in Aixtron MOCVD Reactors. These SiC Coating Set Disc are crafted using high purity graphite and feature a CVD SiC coating with impurity below 5ppm. Your inquiry is welcomed.
  • Tantalum Carbide Coated Porous Graphite

    Tantalum Carbide Coated Porous Graphite

    Tantalum Carbide Coated Porous Graphite is an indispensable product in the semiconductor processing process, especially in the SIC crystal growth process. After continuous R&D investment and technology upgrades, VeTek Semiconductor's TaC Coated Porous Graphite product quality has won high praise from European and American customers. Welcome to your further consultation.

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