Products

Veteksemicon focus ring is designed specifically for demanding semiconductor etching equipment, particularly SiC etching applications. Mounted around the electrostatic chuck (ESC), in close proximity to the wafer, its primary function is to optimize the electromagnetic field distribution within the reaction chamber, ensuring uniform and focused plasma action across the entire wafer surface. A high-performance focus ring significantly improves etch rate uniformity and reduces edge effects, directly boosting product yield and production efficiency.

Veteksemicon Silicon Carbide Carrier Plate For LED Etching, specifically designed for LED chip manufacturing, is a core consumable in the etching process. Made from precision-sintered high-purity silicon carbide, it offers exceptional chemical resistance and high-temperature dimensional stability, effectively resisting corrosion from strong acids, bases, and plasma. Its low contamination properties ensure high yields for LED epitaxial wafers, while its durability, far exceeding that of traditional materials, helps customers reduce overall operating costs, making it a reliable choice for improving etching process efficiency and consistency.

Veteksemicon graphite boat for PECVD is precision-machined from high-purity graphite and designed specifically for plasma-enhanced chemical vapor deposition processes. Leveraging our deep understanding of semiconductor thermal field materials and precision machining capabilities, we offer graphite boats with exceptional thermal stability, excellent conductivity, and a long service life. These boats are designed to ensure highly uniform thin film deposition across every wafer in the demanding PECVD process environment, improving process yield and productivity.

The CVD TaC Coated Graphite Ring by Veteksemicon is engineered to meet the extreme demands of semiconductor wafer processing. Utilizing Chemical Vapor Deposition (CVD) technology, a dense and uniform Tantalum Carbide (TaC) coating is applied to high-purity graphite substrates, achieving exceptional hardness, wear resistance, and chemical inertness. In semiconductor fabrication, the CVD TaC Coated Graphite Ring is widely used in MOCVD, etching, diffusion, and epitaxial growth chambers, serving as a key structural or sealing component for wafer carriers, susceptors, and shielding assemblies. Looking forward to your further consultation.

The porous TaC coated graphite ring produced by VETEK uses a lightweight porous graphite substrate and is coated with a high-purity tantalum carbide coating, featuring excellent resistance to high temperatures, corrosive gases and plasma erosion

The Silicon Carbide Cantilever Paddle from Veteksemicon is engineered for advanced wafer processing in semiconductor manufacturing. Made of high-purity SiC, it delivers outstanding thermal stability, superior mechanical strength, and excellent resistance to high temperatures and corrosive environments. These features ensure precise wafer handling, extended service life, and reliable performance in processes such as MOCVD, epitaxy, and diffusion. Welcome to consult.