Products

Our silicon carbide (SiC) robotic arm is designed for high-performance wafer handling in advanced semiconductor manufacturing. Made of high-purity silicon carbide, this robotic arm offers exceptional resistance to high temperatures, plasma corrosion, and chemical attack, ensuring reliable operation in demanding cleanroom environments. Its exceptional mechanical strength and dimensional stability enable precise wafer handling while minimizing contamination risks, making it an ideal choice for MOCVD, epitaxy, ion implantation, and other critical wafer handling applications. We welcome your inquiries.

Veteksemicon specializes in providing customized Quartz Wafer Boat products for the semiconductor industry. Our product line includes Semiconductor Fused Quartz Glass Boats, Quartz Diffusion Boats, and Customized Quartz Annealing Boats, widely used in high-precision processes such as diffusion, oxidation, and CVD. Veteksemicon insists on providing comprehensive customized services of products and technologies. Looking forward to your further consultation.

Veteksemicon SiC wafer boats are widely used in critical high-temperature processes in semiconductor manufacturing, serving as reliable carriers for oxidation, diffusion, and annealing processes for silicon-based integrated circuits. They also excel in the third-generation semiconductor sector, perfectly suited for demanding processes such as epitaxial growth (EPI) and metal-organic chemical vapor deposition (MOCVD) for SiC and GaN power devices. They also support the high-temperature fabrication of high-efficiency solar cells in the photovoltaic industry. Looking forward to your further consultation.

The CVD SiC Coated Graphite Shower Head from Veteksemicon is a high-performance component specifically designed for semiconductor chemical vapor deposition (CVD) processes. Manufactured from high-purity graphite and protected with a chemical vapor deposition (CVD) silicon carbide (SiC) coating, this shower head delivers outstanding durability, thermal stability, and resistance to corrosive process gases. Looking forward to your further consultation.

The Quartz Shower Head, also known as a Quartz Gas Distribution Plate, is a critical component used in semiconductor thin-film deposition processes such as CVD(Chemical Vapor Deposition), PECVD (Plasma-Enhanced CVD),and ALD (Atomic Layer Deposition). Made from high-purity fused quartz, this component ensures ultra-low contamination and excellent thermal stability, enabling precise gas delivery and uniform film growth across the wafer surface. Looking forward to your further consultation.

Our TaC-coated graphite guide rings are precision core components for semiconductor wafer manufacturing. They feature a high-purity graphite substrate coated with a wear-resistant and chemically inert tantalum carbide (TaC) coating. Designed for demanding processes such as epitaxial deposition and plasma etching, they ensure precise wafer alignment and stability, effectively control contamination, and significantly extend component life. Veteksemicon offers customization services to perfectly match your equipment and process requirements.