SiC coated graphite susceptor for ASM

General product information

Product business terms

✔ Application: Veteksemicon SiC-coated graphite substrate is a key consumable for the ASM series epitaxial equipment. It directly supports the wafer and provides a uniform and stable thermal field during high-temperature epitaxy, making it a core component for ensuring the high-quality growth of advanced semiconductor materials such as GaN and SiC.

✔ Services that can be provided: customer application scenario analysis, matching materials, technical problem solving. 

✔ Company profile：Veteksemicon has 2 laboratories, a team of experts with 20 years of material experience, with R&D and production, testing and verification capabilities.

Technical Parameters

Veteksemicon SiC coated graphite susceptor for ASM core advantages

1. Extreme purity and low defect rate

Using high-purity, fine-particle-grade special graphite substrate, combined with our strictly controlled chemical vapor deposition (CVD) coating process, we ensure that the coating is dense, free of pinholes, and free of impurities. This significantly reduces the risk of particulate contamination during the epitaxial process, providing a clean substrate environment for the growth of high-quality epitaxial layers.

2. Excellent corrosion resistance and wear resistance

The pyrolytic silicon carbide coating possesses extremely high hardness and chemical inertness, effectively resisting the erosion of silicon sources (such as SiH4, SiHCl3), carbon sources (such as C3H8), and etching gases (such as HCl, H2) at high temperatures. This significantly extends the maintenance cycle of the base and reduces machine downtime caused by component replacement.

3. Excellent thermal uniformity and stability

We optimized the thermal field distribution within the operating temperature range through precise substrate structure design and coating thickness control. This directly translates into excellent thickness and resistivity uniformity in the epitaxial wafer, contributing to improved chip manufacturing yield.

4. Excellent coating adhesion strength

Unique surface pretreatment and gradient coating technology enable the silicon carbide coating to form a strong bonding layer with the graphite substrate, effectively preventing coating peeling, flaking, or cracking problems that may occur during long-term thermal cycling.

5. Precise size and structural replication

We possess mature CNC machining and testing capabilities, enabling us to completely replicate the complex geometry, cavity dimensions, and mounting interfaces of the original base, ensuring perfect matching and plug-and-play functionality with the customer's platform.

6. Ecological chain verification endorsement

Veteksemicon SiC coated graphite susceptor for ASM' ecological chain verification covers raw materials to production, has passed international standard certification, and has a number of patented technologies to ensure its reliability and sustainability in the semiconductor and new energy fields.

For detailed technical specifications, white papers, or sample testing arrangements, please contact our Technical Support Team to explore how Veteksemicon can enhance your process efficiency.

Main application fields

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