Silicon Carbide Focus ring

General product information

Product business terms

Application: In semiconductor dry etching processes, the focus ring is a key component that ensures process uniformity. It tightly surrounds the wafer and, by precisely controlling the distribution of plasma at the wafer edges, directly determines the uniformity and consistency of the etching process, making it an indispensable part of guaranteeing chip yield.

Services that can be provided: customer application scenario analysis, matching materials, technical problem solving.

Company profile：Veteksemicon has 2 laboratories, a team of experts with 20 years of material experience, with R&D and production, testing and verification capabilities.

Technical Parameters

Veteksemicon focus ring core advantages

1. Exceptional materials science, born for harsh environments

Our selected high-purity, high-density silicon carbide material can easily withstand the intense plasma bombardment and fluorine-containing chemical gas corrosion during the SiC etching process. Its excellent corrosion resistance directly translates into a longer service life and lower component replacement frequency, not only reducing equipment downtime but also significantly reducing the risk of particle contamination caused by component wear, providing you with long-term and stable comprehensive cost-effectiveness.

2. Precise engineering design ensures consistent process

Each Veteksemicon focus ring undergoes ultra-precision CNC machining to ensure that key dimensions such as flatness, inner diameter, and step height achieve micron-level accuracy, ensuring perfect matching with the original equipment manufacturer (OEM). Our engineering team further optimizes the profile using plasma simulation. This design effectively guides the electric field, reducing abnormal etching at the wafer edges and thus controlling the etching uniformity of the entire wafer to an extreme level.

3. Reliable performance improves production efficiency

In demanding mass production environments, the full value of our products is realized. By ensuring concentrated and stable plasma distribution, the Veteksemicon focus ring directly contributes to improved etching rate uniformity and optimized batch-to-batch process repeatability. This means your production line can consistently deliver high-yield products, while also benefiting from longer maintenance cycles, effectively reducing consumable costs per wafer and giving you a significant competitive edge.

4. Ecological chain verification endorsement

Veteksemicon focus ring' ecological chain verification covers raw materials to production, has passed international standard certification, and has a number of patented technologies to ensure its reliability and sustainability in the semiconductor and new energy fields.

For detailed technical specifications, white papers, or sample testing arrangements, please contact our Technical Support Team to explore how Veteksemicon can enhance your process efficiency.

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