CVD TaC Coated Graphite Ring

1. General product information

Application: Veteksemicon CVD TaC Coated Ring is specially developed for SiC crystal growth processes. As a key load-bearing component within the high-temperature reaction chamber, its unique TaC coating effectively isolates silicon vapor corrosion, prevents impurity contamination, and ensures structural stability in long-term high-temperature environments, providing a reliable guarantee for obtaining high-quality crystals.

Services that can be provided: customer application scenario analysis, matching materials, technical problem solving.

Company profile：Veteksemicon has 2 laboratories, a team of experts with 20 years of material experience, with R&D and production, testing and verification capabilities.

Veteksemicon CVD TaC Coated Ring is a core consumable designed for high temperature chemical vapor deposition and crystal growth of advanced semiconductor materials, particularly silicon carbide. We utilize a unique, optimized chemical vapor deposition technology to deposit a dense, uniform tantalum carbide coating on a high-purity graphite substrate. With exceptional high-temperature resistance, excellent corrosion resistance, and an extremely long service life, this product effectively protects crystal quality and significantly reduces your overall production costs, making it an essential choice for processes requiring process stability and the highest yield.

Technical Parameters

Veteksemicon CVD TaC Coated Ring core advantages

Unparalleled purity and stability

In the extreme environment of SiC crystal growth, where temperatures exceed 2000°C, even trace impurities can destroy the electrical properties of the entire crystal. Our CVD TaC coating, with its exceptional purity, fundamentally eliminates contamination from the ring. Furthermore, its excellent high-temperature stability ensures that the coating will not decompose, volatilize, or react with process gases during prolonged high-temperature and thermal cycling, providing a pure and stable vapor phase environment for crystal growth.

Excellent corrosion and erosion resistance

Corrosion of graphite by silicon vapor is the primary cause of failure and particle contamination in traditional graphite rings. Our TaC coating, with its extremely low chemical reactivity with silicon, effectively blocks silicon vapor, protecting the underlying graphite substrate from erosion. This not only significantly extends the life of the ring itself but, more importantly, significantly reduces particulate matter generated by substrate corrosion and spalling, directly improving crystal growth yield and internal quality.

Superb mechanical performance and service life

The TaC coating formed by the CVD process has extremely high density and Vickers hardness, making it extremely resistant to wear and physical impact. In practical applications, our products can extend the service life by 3 to 8 times compared to traditional graphite rings or pyrolytic carbon/silicon carbide coated rings. This means less downtime for replacement and higher equipment utilization, significantly reducing the overall cost of single crystal production.

Excellent coating quality

The performance of a coating is highly dependent on its uniformity and bonding strength. Our optimized CVD process enables us to achieve highly uniform coating thickness on even the most complex ring geometries. More importantly, the coating forms a strong metallurgical bond with the high-purity graphite substrate, effectively preventing peeling, cracking, or flaking caused by differences in thermal expansion coefficients during rapid heating and cooling cycles, ensuring continued reliable performance throughout the product's lifecycle.

Ecological chain verification endorsement

Veteksemicon CVD TaC Coated Ring' ecological chain verification covers raw materials to production, has passed international standard certification, and has a number of patented technologies to ensure its reliability and sustainability in the semiconductor and new energy fields.

For detailed technical specifications, white papers, or sample testing arrangements, please contact our Technical Support Team to explore how Veteksemicon can enhance your process efficiency.