TaC Coating Rotation Plate

VeTek Semiconductor's TaC coating Rotation Plate has a high purity composition, an impurity content of less than 5ppm, and a dense and uniform structure,which is widely used in LPE EPI systems,Aixtron systems,Nuflare systems,TEL CVD systems,VEECO systems,TSI systems.

●  Excellent mechanical properties:

Coating hardness up to 2300HV, with excellent wear resistance.

The adhesion between the coating and the substrate is strong, and it is not easy to fall off or peel.

The coating can still maintain good structural stability at high temperature.

●  Excellent corrosion resistance:

TaC material itself has excellent chemical stability and corrosion resistance.

VeTek semiconductor's coatings perform well in a variety of aggressive gas environments.

Can effectively protect the internal components of the equipment from corrosion damage.

●  High surface finish:

VeTek semiconductor uses a precise coating process to produce the desired finish.

Low surface roughness helps reduce particle accumulation and deposition.

●  Coating consistency is good:

VeTek Semiconductor has a sound quality control system to ensure consistent performance between batches.

The coating thickness is evenly distributed and there are no obvious local defects.

●  Excellent practical application performance:

VeTek semiconductor's TaC coating is widely used in many well-known epitaxial equipment manufacturers at home and abroad.

Product Physical parameter of the TaC Coated Rotation Plate:

Tantalum carbide coating on a microscopic cross-section