Products

Designed to surround the wafer tracking zone, the Solid SiC Focus Ring ensures linear plasma distribution and exact edge-to-center etch profiles.These premium β-SiC components are built by Vetek Semiconductor (Wuyi Tianyao New Material Technology Co., LTD) using proprietary Chemical Vapor Deposition (CVD) technology. By vaporizing raw materials into a dense, binderless matrix, Vetek eliminates the porous micro-gaps common in older materials. Compared to standard quartz or silicon shielding, our CVD SiC components stand up far better to corrosive halogen gases, shielding the wafer in deep sub-7nm logic and dense memory chip manufacturing.Looking forward to your further inquiry.

Veteksemi solid SiC focus ring significantly improves etching uniformity and process stability by precisely controlling the electric field and airflow at the wafer edge. It is widely used in precision etching processes for silicon, dielectrics, and compound semiconductor materials, and is a key component for ensuring mass production yield and long-term reliable equipment operation.

VeTek Semiconductor's solid SiC wafer carrier is designed for high temperature and corrosion resistant environments in semiconductor epitaxial processes and is suitable for all types of wafer manufacturing processes with high purity requirements. VeTek Semiconductor is a leading wafer carrier supplier in China and looks forward to becoming your long-term partner in the semiconductor industry.

VeTek Semiconductor is a leading semiconductor equipment manufacturer in China and a professional manufacturer and supplier of Solid SiC Disc-shaped Shower Head. Our Disc shape Shower Head is widely used in thin film deposition production such as CVD process to ensure uniform distribution of reaction gas and is one of the core components of CVD furnace.

Solid SiC Gas Shower Head plays a major role in making the gas uniform in the CVD process, thereby ensuring uniform heating of the substrate. VeTek Semiconductor has been deeply involved in the field of solid SiC devices for many years and is able to provide customers with customized Solid SiC Gas Shower Heads. No matter what your requirements are, we look forward to your inquiry.

VeTek Semiconductor has always been committed to the research and development and manufacturing of advanced semiconductor materials. Today, VeTek Semiconductor has made great progress in Chemical Vapor Deposition Process Solid SiC Edge Ring products and is able to provide customers with highly customized solid SiC edge rings. Solid SiC edge rings provide better etching uniformity and precise wafer positioning when used with an electrostatic chuck, ensuring consistent and reliable etching results. Looking forward to your inquiry and becoming each other's long-term partners.