China Aixtron G5+ Manufacturer, Supplier, Factory

It is ideal to build integrated circuits or semiconductor devices on a perfect crystalline base layer. The epitaxy (epi) process in semiconductor manufacturing aims to deposit a fine single-crystalline layer, usually about 0.5 to 20 microns, on a single-crystalline substrate. The epitaxy process is an important step in the manufacture of semiconductor devices, especially in silicon wafer manufacturing.

When you see the third-generation semiconductors, you will surely wonder what the first and second generations were. The "generation" here is classified based on the materials used in semiconductor manufacturing.

Chemical vapor deposition (CVD) in semiconductor manufacturing is used to deposit thin film materials in the chamber, including SiO2, SiN, etc., and commonly used types include PECVD and LPCVD. By adjusting the temperature, pressure and reaction gas type, CVD achieves high purity, uniformity and good film coverage to meet different process requirements.

Silicon carbide (SiC)'s Key growth methods include PVT, TSSG, and HTCVD, each with distinct advantages and challenges. Carbon-based thermal field materials like insulation systems, crucibles, TaC coatings, and porous graphite enhance crystal growth by providing stability, thermal conductivity, and purity, essential for SiC's precise fabrication and application.

VETEK celebrates the topping-out ceremony of its new semiconductor manufacturing base, expanding production capacity for advanced SiC, TaC and PyC coating technologies, Solid SiC components, high-purity graphite parts and semiconductor thermal field materials.

In modern chip manufacturing, the substrate provides physical support and a heat dissipation path, while the epitaxial layer determines the electrical performance limits of the device. This article provides an in-depth analysis of the fundamental differences between single-crystal silicon and silicon carbide substrates and CVD/MBE epitaxial processes, and reveals how epitaxial technology enhances the performance of high-frequency and high-voltage devices by reducing defect density and incorporating strain engineering. Whether you are a process engineer or a procurement decision-maker, this guide will help you quickly identify the most suitable wafer selection strategy.