CVD SiC coating ring

There are many small parts in the half-moon parts, and SiC coating ring is one of them.By applying a layer of CVD SiC coating on the surface of high-purity graphite ring by CVD method, we can obtain CVD SiC coating ring. SiC coating ring with SiC coating have excellent properties such as high temperature resistance, excellent mechanical properties, chemical stability, good thermal conductivity, good electrical insulation, and excellent oxidation resistance.CVD SiC coating ring and SiC coating susceptor work together.

SiC coating ring and cooperating susceptor

The functions of the CVD SiC coating ring:

  ●   Flow distribution: The geometric design of the SiC coating ring helps to form a uniform gas flow field, so that the reaction gas can evenly cover the surface of the substrate, ensuring uniform epitaxial growth.

  ●   Heat exchange and temperature uniformity: The CVD SiC coating ring provides good heat exchange performance, thereby maintaining uniform temperature of the CVD SiC coating ring and substrate. This can avoid crystal defects caused by temperature fluctuations.

  ●   Interface blocking: The CVD SiC coating ring can limit the diffusion of reactants to a certain extent, so that they react in a specific area, thereby promoting the growth of high-quality SiC crystals.

  ●   Support function: The CVD SiC coating ring is combined with the disk below to form a stable structure to prevent deformation in high temperature and reaction environment, and maintain the overall stability of the reaction chamber.

VeTek Semiconductor is always committed to providing customers with high-quality CVD SiC coating rings and helping customers complete solutions at the most competitive prices. No matter what kind of CVD SiC coating ring you need, please feel free to consult VeTek Semiconductor!

SEM DATA OF CVD SIC FILM CRYSTAL STRUCTURE：

Basic physical properties of CVD SiC coating：