Other Semiconductor Ceramics

The Porous SiC Ceramic Chuck by Veteksemicon is a precision-engineered vacuum platform designed for secure and particle-free wafer handling in advanced semiconductor processes such as etching, ion implantation, CMP, and inspection. Manufactured from high-purity porous silicon carbide, it offers outstanding thermal conductivity, chemical resistance, and mechanical strength. With customizable pore sizes and dimensions, Veteksemicon delivers tailored solutions to meet the stringent demands of cleanroom wafer processing environments.

Our Quartz Wafer Boats are high-purity wafer carrier solution tailored for semiconductor, LED, solar cell, and battery manufacturing processes. Engineered to endure high temperatures and chemically aggressive environments, this quartz boat features low thermal expansion, excellent electrical insulation, and long-term dimensional stability. Ideal for diffusion, oxidation, and LPCVD processes, it supports precise wafer alignment and is available in various sizes to meet different equipment requirements.

Our High purity quartz boat is made of fused quartz (SiO₂ content ≥ 99.99%). With its excellent resistance to extreme environments, low thermal expansion coefficient, and long life cycle, it has become an irreplaceable key consumable in the semiconductor and new energy industries.

Focus ring for Etching is the key component to ensure process accuracy and stability. These components are precisely assembled in a vacuum chamber to achieve uniform machining of nanoscale structures on the wafer surface through precise control of plasma distribution, edge temperature and electric field uniformity.

Veteksemicon is a leading vacuum chuck manufacturer in China, Our ceramic vacuum chuck serves as a high - end vacuum adsorption device oriented towards accurately adsorbing and immobilizing wafers and ingots. Welcome your inquiry.

Semiconductor grade Quartz Bell Jar is an important equipment component mainly used in high temperature, high pressure and high purity environments. It is made of high purity quartz material, has excellent thermal stability, chemical resistance and optical transparency, and is widely used in industrial fields such as semiconductor manufacturing and LED production. VeTek Semiconductor has many years of process accumulation in Semiconductor grade Quartz Bell Jar and can provide customized products according to customer needs. Looking forward to your inquiry.