High-purity Quartz Bath

 General product information

Application: Veteksemi high-purity quartz baths are core vessels in semiconductor wet processing, specifically designed to withstand high-temperature, strong acids. Their high-purity quartz material completely eliminates metal contamination, withstands thermal shock exceeding 1000°C, and resists long-term corrosion from most acids and bases. They are widely used in cleaning and etching processes in chip manufacturing, solar cells, LEDs, and other fields, and are the cornerstone for ensuring process purity and product yield.

Services that can be provided: customer application scenario analysis, matching materials, technical problem solving.

Company profile：Semixlab has 2 laboratories, a team of experts with 20 years of material experience, with R&D and production, testing and verification capabilities.

Technical parameters

Extremely pure material

We use arc melting to produce high-purity synthetic quartz glass, with a consistently high SiO2 content exceeding 99.99%. This material's core advantage lies in its extremely low background levels of alkali metals (such as potassium and sodium) and heavy metals (such as iron and copper). This effectively eliminates surface precipitation and contamination that can occur in high-temperature acid baths, protecting your wafers from trace impurities during critical cleaning steps and ensuring the reliability of your device's electrical performance.

Excellent thermal shock resistance

Thanks to the extremely low thermal expansion coefficient of synthetic quartz glass, combined with our unique step-annealing process, internal stress is completely eliminated. This allows the bath to calmly withstand repeated and drastic operating temperature fluctuations from room temperature to 1100°C, effectively avoiding cracking or hidden damage caused by sudden increases in thermal stress, significantly reducing the risk of production interruptions and wafer loss caused by accidental bath breakage.

Intrinsic corrosion resistance

High-purity quartz exhibits excellent chemical inertness to most strong acids (such as concentrated sulfuric acid, nitric acid, hydrochloric acid, and aqua regia) except hydrofluoric acid and hot phosphoric acid. It maintains a stable chemical structure and surface condition even after prolonged immersion in high-temperature acid solutions, offering far superior corrosion resistance compared to other materials. This significantly extends the product's lifespan and reduces the overall operating costs associated with frequent replacement.

Precision surface treatment

All internal surfaces, edges, and welds undergo rigorous flame polishing. This process not only eliminates microcracks and sharp edges, but also creates a smooth, dense, and chemically inert surface layer. This surface effectively reduces chemical residue and particulate matter absorption, greatly facilitating rapid and thorough cleaning between tanks, fundamentally reducing the risk of cross-contamination between batches.

Ecological chain verification endorsement

Veteksemi high-purity quartz bath' ecological chain verification covers raw materials to production, has passed international standard certification, and has a number of patented technologies to ensure its reliability and sustainability in the semiconductor and new energy fields.

For detailed technical specifications, white papers, or sample testing arrangements, please contact our Technical Support Team to explore how Veteksemi can enhance your process efficiency.