CVD Silicon Carbide(SiC) Coated Graphite Shower Head

Key Features

• Ultra‑high purity – The SiC coating seals the graphite completely, so no outgassing or metal contamination.

• Excellent gas distribution – Each shower head is machined to deliver a consistent gas velocity across the whole wafer.

• Superior corrosion resistance – CVD SiC doesn’t react with halogens or process residues. It lasts much longer than bare graphite or quartz.

• Outstanding thermal performance – The coating matches graphite’s thermal expansion closely, so no cracking during rapid temperature ramps.

• Precision manufacturing – We use CNC machining and in‑house CVD coating. Hole diameters and patterns are held to tight tolerances.

Technical Specifications

Applications

These shower heads are used in:

• Semiconductor CVD systems (both production and R&D)

• PECVD equipment – low‑temperature dielectrics

• MOCVD reactors – III‑V compounds like GaN, InP

• Silicon epitaxy (Si Epi) – for power devices and CMOS

• SiC epitaxy – high‑voltage power electronics

• Compound semiconductor fabs

• Advanced packaging (e.g., TSV liner deposition)

• Any thin‑film tool that needs a corrosion‑proof, high‑purity gas distributor

Why Choose VETEK?

• We’re not a trading company. Everything – from graphite machining to final CVD SiC coating – is done in‑house. That means we control the quality, lead time, and cost.

• Complete in‑house manufacturing – no outsourcing surprises

• Advanced coating technology – dense, pin‑hole‑free CVD SiC

• Custom engineering support – send us your shower head drawing or just the reactor model

• Reliable semiconductor supply chain – we’ve been supplying fabs and OEMs for years

• You don’t have to re‑qualify a new design every time. We’ve already coated shower heads for many common platforms (AMAT, TEL, LAM, ASM, etc.).