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Tantalum Carbide Coating

VeTek semiconductor is a leading manufacturer of Tantalum Carbide Coating materials for the semiconductor industry. Our main product offerings include CVD tantalum carbide coating parts, sintered TaC coating parts for SiC crystal growth or semiconductor epitaxy process. Passed ISO9001, VeTek Semiconductor has good control on quality. VeTek Semiconductor is dedicated to become innovator in Tantalum Carbide Coating industry through ongoing research and development of iterative technologies.


The main products are TaC Coated Guide Ring, CVD TaC coated three-petal guide ring, Tantalum Carbide TaC Coated Halfmoon, CVD TaC coating planetary SiC epitaxial susceptor, Tantalum Carbide Coating Ring, Tantalum Carbide Coated Porous Graphite, TaC Coating Rotation Susceptor, Tantalum Carbide Ring, TaC Coating Rotation Plate, TaC coated wafer susceptor, TaC Coated Deflector Ring, CVD TaC Coating Cover, TaC Coated Chuck etc., the purity is below 5ppm, can meet customer requirements.


TaC coating graphite is created by coating the surface of a high-purity graphite substrate with a fine layer of tantalum carbide by a proprietary Chemical Vapor Deposition (CVD) process.The advantage is showed in below picture:


Excellent properties of TaC coating graphite


The tantalum carbide (TaC) coating has gained attention due to its high melting point of up to 3880°C, excellent mechanical strength, hardness, and resistance to thermal shocks, making it an attractive alternative to compound semiconductor epitaxy processes with higher temperature requirements, such as Aixtron MOCVD system and LPE SiC epitaxy process.It also has a wide application in PVT method SiC crystal growth process.


Key Features:

 ● Temperature stability

 ● Ultra high purity

 ● Resistance to H2, NH3, SiH4,Si

 ● Resistance to thermal stock

 ● Strong adhesion to graphite

 ● Conformal coating coverage

 ● Size up to 750 mm diameter(The only manufacturer in China reaches this size)


Applications:

 ● Wafer carrier

 ● Inductive heating susceptor

 ● Resistive heating element

 ● Satellite disk

 ● Shower head

 ● Guide ring

 ● LED Epi susceptor

 ● Injection nozzle

 ● Masking ring

 ● Heat shield


Tantalum carbide (TaC) coating on a microscopic cross-section:


the microscopic cross-section of Tantalum carbide (TaC) coating


Parameter of VeTek Semiconductor Tantalum Carbide Coating:

Physical properties of TaC coating
Density 14.3 (g/cm³)
Specific emissivity 0.3
Thermal expansion coefficient 6.3 10-6/K
Hardness (HK) 2000 HK
Resistance 1×10-5 Ohm*cm
Thermal stability <2500℃
Graphite size changes -10~-20um
Coating thickness ≥20um typical value (35um±10um)


TaC coating EDX data：

EDX data of TaC coating


TaC coating crystal structure data:

Element Atomic percent
Pt. 1 Pt. 2 Pt. 3 Average
C K 52.10 57.41 52.37 53.96
Ta M 47.90 42.59 47.63 46.04


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Tantalum Carbide Coated Tube for Crystal Growth

Tantalum Carbide Coated Tube for Crystal Growth

Tantalum Carbide Coated Tube for Crystal Growth is mainly used in SiC crystal growth process. VeTek Semiconductor has been supplying Tantalum Carbide Coated Tube for Crystal Growth for many years and has been working in the field of TaC coating for many years. Our products have a high purity and high temperature resistance. We look forward to becoming your long-term partner in China. Feel free to inquire us.
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TaC Coated Ring for SiC Epitaxial Reactor

TaC Coated Ring for SiC Epitaxial Reactor

VeTek Semiconductor is a leading manufacturer and technology innovator of TaC Coated Ring for SiC Epitaxial Reactor in China, focusing on providing high-performance solutions for SiC epitaxial reactors. We have many years of experience in TaC coating technology. TaC Coated Ring has the characteristics of high purity, high stability, excellent corrosion resistance, etc., and can provide long-term stable performance in the harsh working environment of epitaxial reactors. We look forward to establishing a long-term strategic partnership with you.
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Tantalum Carbide Coated Halfmoon Part for LPE

Tantalum Carbide Coated Halfmoon Part for LPE

VeTek Semiconductor is a leading supplier of Tantalum Carbide Coated Halfmoon Part for LPE in China, focusing on TaC coating technology for many years. Our Tantalum Carbide Coated Halfmoon Part for LPE is designed for liquid phase epitaxy process and can withstand high temperature of over 2000 degrees Celsius. With excellent material performance and process innovation, our product life is at the leading level in the industry. VeTek Semiconductor looks forward to being your long-term partner in China.
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TaC Coated Guide Ring

TaC Coated Guide Ring

TaC Coated Guide Ring is made of high-quality graphite and TaC coating. In the preparation of SiC crystals by PVT method, VeTek Semiconductor's TaC coated guide ring is mainly used to guide and control the airflow, optimize the single crystal growth process, and improve the single crystal yield. With excellent TaC coating technology, our products have excellent high temperature resistance, corrosion resistance and good mechanical properties.
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Tantalum Carbide Coated Planetary Rotation Disk

Tantalum Carbide Coated Planetary Rotation Disk

VeTek Semiconductor is a leading manufacturer and supplier of Tantalum Carbide Coated Planetary Rotation Disk in China, focusing on TaC coating technology for many years. Our products have high purity and excellent high temperature resistance, which are widely recognized by semiconductor manufacturers. VeTek Semiconductor Tantalum Carbide Coated Planetary Rotation Disk has become the backbone of the wafer epitaxy industry. We look forward to establishing a long-term partnership with you to jointly promote technological progress and production optimization.
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TaC Coated Graphite Wafer Carrier

TaC Coated Graphite Wafer Carrier

VeTek Semiconductor has carefully designed TaC Coated Graphite Wafer Carrier for customers. It is composed of high-purity graphite and TaC coating, which is suitable for various wafer epitaxial wafer processing. We have been specialized in SiC and TaC coating for many years. Compared with SiC coating, Our TaC coated graphite wafer carrier has a higher temperature resistance and wear-resistant. We look forward to becoming your long-term partner in China.
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As a professional Tantalum Carbide Coating manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Tantalum Carbide Coating made in China, you can leave us a message.
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