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Tantalum Carbide Coating

VeTek semiconductor is a leading manufacturer of Tantalum Carbide Coating materials for the semiconductor industry. Our main product offerings include CVD tantalum carbide coating parts, sintered TaC coating parts for SiC crystal growth or semiconductor epitaxy process. Passed ISO9001, VeTek Semiconductor has good control on quality. VeTek Semiconductor is dedicated to become innovator in Tantalum Carbide Coating industry through ongoing research and development of iterative technologies.


The main products are TaC Coated Guide Ring, CVD TaC coated three-petal guide ring, Tantalum Carbide TaC Coated Halfmoon, CVD TaC coating planetary SiC epitaxial susceptor, Tantalum Carbide Coating Ring, Tantalum Carbide Coated Porous Graphite, TaC Coating Rotation Susceptor, Tantalum Carbide Ring, TaC Coating Rotation Plate, TaC coated wafer susceptor, TaC Coated Deflector Ring, CVD TaC Coating Cover, TaC Coated Chuck etc., the purity is below 5ppm, can meet customer requirements.


TaC coating graphite is created by coating the surface of a high-purity graphite substrate with a fine layer of tantalum carbide by a proprietary Chemical Vapor Deposition (CVD) process.The advantage is showed in below picture:


Excellent properties of TaC coating graphite


The tantalum carbide (TaC) coating has gained attention due to its high melting point of up to 3880°C, excellent mechanical strength, hardness, and resistance to thermal shocks, making it an attractive alternative to compound semiconductor epitaxy processes with higher temperature requirements, such as Aixtron MOCVD system and LPE SiC epitaxy process.It also has a wide application in PVT method SiC crystal growth process.


Key Features:

 ● Temperature stability

 ● Ultra high purity

 ● Resistance to H2, NH3, SiH4,Si

 ● Resistance to thermal stock

 ● Strong adhesion to graphite

 ● Conformal coating coverage

 ● Size up to 750 mm diameter(The only manufacturer in China reaches this size)


Applications:

 ● Wafer carrier

 ● Inductive heating susceptor

 ● Resistive heating element

 ● Satellite disk

 ● Shower head

 ● Guide ring

 ● LED Epi susceptor

 ● Injection nozzle

 ● Masking ring

 ● Heat shield


Tantalum carbide (TaC) coating on a microscopic cross-section:


the microscopic cross-section of Tantalum carbide (TaC) coating


Parameter of VeTek Semiconductor Tantalum Carbide Coating:

Physical properties of TaC coating
Density 14.3 (g/cm³)
Specific emissivity 0.3
Thermal expansion coefficient 6.3 10-6/K
Hardness (HK) 2000 HK
Resistance 1×10-5 Ohm*cm
Thermal stability <2500℃
Graphite size changes -10~-20um
Coating thickness ≥20um typical value (35um±10um)


TaC coating EDX data：

EDX data of TaC coating


TaC coating crystal structure data:

Element Atomic percent
Pt. 1 Pt. 2 Pt. 3 Average
C K 52.10 57.41 52.37 53.96
Ta M 47.90 42.59 47.63 46.04


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TaC Coated Three-petal Ring

TaC Coated Three-petal Ring

VeTek Semiconductor is a leading TaC Coated Three-petal Ring manufacturer and innovator in China.We have been specialized in TaC and SiC coating for many years.Our products have a corrosion resistance, high strength. We look forward to becoming your long-term partner in China.Welcome to consult at any time.
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Tantalum Carbide Coated Chuck

Tantalum Carbide Coated Chuck

VeTek Semiconductor is a leading Tantalum Carbide Coated Chuck manufacturer and innovator in China.We have been specialized in TaC coating for many years.Our products have a high purity and high temperature resistance up to 2000℃.We look forward to becoming your long-term partner in China.Welcome to consult at any time.
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Tantalum Carbide Coated Cover

Tantalum Carbide Coated Cover

VeTek Semiconductor is a leading Tantalum Carbide Coated Cover manufacturer and innovator in China.We have been specialized in TaC and SiC coating for many years.Our products have a corrosion resistance, high strength. We look forward to becoming your long-term partner in China.Welcome to consult at any time.
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Porous Graphite with TaC Coated

Porous Graphite with TaC Coated

Porous Graphite with TaC Coated is an advanced semiconductor processing material provided by VeTek Semiconductor. Porous Graphite with TaC Coated combines the advantages of porous graphite and tantalum carbide (TaC) coating, with good thermal conductivity and gas permeability. VeTek Semiconductor is committed to providing quality products at competitive prices.
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Tantalum Carbide Coating Cover

Tantalum Carbide Coating Cover

Tantalum Carbide Coating Cover is composed of high-purity graphite and TaC coating. VeTek Semiconductor is a leading supplier and manufacturer of Tantalum Carbide Coating Cover in China. We focus on providing high-purity, high-temperature resistant tantalum carbide products. Our tantalum carbide coated cover have excellent performance and reliability, and can effectively protect materials in extremely high temperature and corrosive environments. We look forward to becoming your long-term partner in China. Welcome to consult at any time.
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TaC Coated Deflector Ring

TaC Coated Deflector Ring

VeTek Semiconductor's TaC Coated Deflector Ring is a highly specialized component designed for SiC crystal growth processes. The TaC coating provides excellent high temperature resistance and chemical inertness to cope with the high temperatures and corrosive environments during crystal growth process. This ensures stable performance and long life of the component, reducing the frequency of replacement and downtime. We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.Welcome to consult at any time.
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As a professional Tantalum Carbide Coating manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Tantalum Carbide Coating made in China, you can leave us a message.
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