LED EPI Susceptor

As the professional LED EPI Susceptor supplier and manufacturer, VeTek Semiconductor would like to provide you high quality LED EPI Susceptor.

VeTeksemicon's LED EPI Susceptor, a cutting-edge product designed for LED epitaxy growth processes. This high-quality susceptor serves as a wafer carrier for LED epitaxy, providing essential support and maintaining the growth of LED epitaxial wafers.

LED EPI Susceptor has excellent high thermal conductivity and high temperature resistance. Usually, Susceptor needs to work in a high temperature environment (above 1000°C), and its material is made of graphite or silicon carbide. These materials have high melting points (such as graphite melting point of about 3650°C) and excellent thermal conductivity (such as silicon carbide thermal conductivity of about 120 W/m·K), which ensures efficient heat transfer.

In addition, the surface of Veteksemicon Susceptor is highly flat, which ensures close contact with the substrate. At the same time, the graphite or silicon carbide materials also have significant chemical inertness, avoiding side reactions with reactive gases (such as NH₃, TMGa, etc.) and preventing contamination of the epitaxial layer.

The LED EPI Susceptor incorporates excellent thermal conductivity, efficiently dissipating heat to maintain a stable growth temperature for epitaxial wafers. This crucial feature enhances process stability and consistency, ensuring consistent and high-quality LED growth. To further enhance its performance, the LED EPI Susceptor is coated with a premium tantalum carbide (TaC) thin film. The TaC coating significantly enhances the durability and reliability of the product, ensuring long-lasting and optimal performance.

VeTeksemicon's LED EPI Susceptor boasts seamless compatibility with various LED epitaxy equipment and processes, making it a versatile solution for diverse epitaxial wafer growth requirements. At the same time, Veteksemicon is committed to providing advanced technology and product solutions for semiconductor epitaxial processing technology. We sincerely look forward to your joining us.