Web Menu

Product Search

Language

Products

Tantalum Carbide Coating

VeTek semiconductor is a leading manufacturer of Tantalum Carbide Coating materials for the semiconductor industry. Our main product offerings include CVD tantalum carbide coating parts, sintered TaC coating parts for SiC crystal growth or semiconductor epitaxy process. Passed ISO9001, VeTek Semiconductor has good control on quality. VeTek Semiconductor is dedicated to become innovator in Tantalum Carbide Coating industry through ongoing research and development of iterative technologies.


The main products are TaC Coated Guide Ring, CVD TaC coated three-petal guide ring, Tantalum Carbide TaC Coated Halfmoon, CVD TaC coating planetary SiC epitaxial susceptor, Tantalum Carbide Coating Ring, Tantalum Carbide Coated Porous Graphite, TaC Coating Rotation Susceptor, Tantalum Carbide Ring, TaC Coating Rotation Plate, TaC coated wafer susceptor, TaC Coated Deflector Ring, CVD TaC Coating Cover, TaC Coated Chuck etc., the purity is below 5ppm, can meet customer requirements.


TaC coating graphite is created by coating the surface of a high-purity graphite substrate with a fine layer of tantalum carbide by a proprietary Chemical Vapor Deposition (CVD) process.The advantage is showed in below picture:


Excellent properties of TaC coating graphite


The tantalum carbide (TaC) coating has gained attention due to its high melting point of up to 3880°C, excellent mechanical strength, hardness, and resistance to thermal shocks, making it an attractive alternative to compound semiconductor epitaxy processes with higher temperature requirements, such as Aixtron MOCVD system and LPE SiC epitaxy process.It also has a wide application in PVT method SiC crystal growth process.


Key Features:

 ● Temperature stability

 ● Ultra high purity

 ● Resistance to H2, NH3, SiH4,Si

 ● Resistance to thermal stock

 ● Strong adhesion to graphite

 ● Conformal coating coverage

 ● Size up to 750 mm diameter(The only manufacturer in China reaches this size)


Applications:

 ● Wafer carrier

 ● Inductive heating susceptor

 ● Resistive heating element

 ● Satellite disk

 ● Shower head

 ● Guide ring

 ● LED Epi susceptor

 ● Injection nozzle

 ● Masking ring

 ● Heat shield


Tantalum carbide (TaC) coating on a microscopic cross-section:


the microscopic cross-section of Tantalum carbide (TaC) coating


Parameter of VeTek Semiconductor Tantalum Carbide Coating:

Physical properties of TaC coating
Density 14.3 (g/cm³)
Specific emissivity 0.3
Thermal expansion coefficient 6.3 10-6/K
Hardness (HK) 2000 HK
Resistance 1×10-5 Ohm*cm
Thermal stability <2500℃
Graphite size changes -10~-20um
Coating thickness ≥20um typical value (35um±10um)


TaC coating EDX data：

EDX data of TaC coating


TaC coating crystal structure data:

Element Atomic percent
Pt. 1 Pt. 2 Pt. 3 Average
C K 52.10 57.41 52.37 53.96
Ta M 47.90 42.59 47.63 46.04


View as  
 
TaC Coating Heater

TaC Coating Heater

VeTek Semiconductor TaC Coating Heater has an extremely high melting point (about 3880°C). The high melting point enables it to operate at extremely high temperatures, especially in the growth of gallium nitride (GaN) epitaxial layers in the metal organic chemical vapor deposition (MOCVD) process. VeTek Semiconductor is committed to providing customers with customized product solutions. We look forward to hearing from you.
View More >> Send Inquiry >>
CVD TAC Coating

CVD TAC Coating

VeTek Semiconductor is china leading CVD TAC Coating products manufacturer. For many years, we have been focusing on various CVD TAC Coating products like CVD TaC coating cover, CVD TaC Coating Ring. VeTek Semiconductor supports customized product services and satisfactory product prices, and looks forward to your further consultation.
View More >> Send Inquiry >>
TaC Coated Chuck

TaC Coated Chuck

With its high temperature resistance, chemical inertness and excellent performance, VeTek Semiconductor's TaC coated chucks are designed for semiconductor furnaces. We believe that our products can bring you advanced technology and quality product solutions.
View More >> Send Inquiry >>
TaC Coating Tube

TaC Coating Tube

VeTek Semiconductor's TaC coating tube is a key component for the successful growth of silicon carbide single crystals. With its high temperature resistance, chemical inertness and excellent performance, that ensures the production of high-quality crystals with consistent results. Trust our innovative solutions to enhance your PVT method SiC crystal growth process and achieve excellent results.Welcome to inquiry us.
View More >> Send Inquiry >>
Porous Tantalum Carbide Coated Graphite Ring

Porous Tantalum Carbide Coated Graphite Ring

View More >> Send Inquiry >>
TaC Coating Spare Part

TaC Coating Spare Part

TaC Coating is currently mainly used in processes such as silicon carbide single crystal growth (PVT method), epitaxial disk (including silicon carbide epitaxy, LED epitaxy), etc. Combined with the good long-term stability of TaC Coating Plate, Veteksemicon's TaC Coating Plate has become the benchmark for TaC Coating spare parts. We look forward to you becoming our long-term partner.
View More >> Send Inquiry >>
As a professional Tantalum Carbide Coating manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Tantalum Carbide Coating made in China, you can leave us a message.
News Recommendations
Intelligent Cutting Technology for Cubic Silicon Carbide Wafers
Intelligent Cutting Technology for Cubic Silicon Carbide WafersView More >>
What is the difference between CVD TaC and sintered TaC?
What is the difference between CVD TaC and sintered TaC?View More >>
The Development History of 3C SiC
The Development History of 3C SiCView More >>
Based on 8-inch silicon carbide single crystal growth furnace technology
Based on 8-inch silicon carbide single crystal growth furnace technologyView More >>
What Exactly is the Third Generation Semiconductor?
What Exactly is the Third Generation Semiconductor?View More >>
How to achieve high quality crystal growth? - SiC crystal growth furnace
How to achieve high quality crystal growth? - SiC crystal growth furnaceView More >>
X
We use cookies to offer you a better browsing experience, analyze site traffic and personalize content. By using this site, you agree to our use of cookies. Privacy Policy
Reject Accept